Equipment and method for preparing high quality precision coating through deposition by adopting arc ion plating

Abstract

The invention provides equipment and method for preparing a high quality precision coating through deposition by adopting arc ion plating, and belongs to the technical field of metal material surface modification. The technical scheme of the equipment lies in that the function of the equipment is improved by simultaneously arranging and using a large-area gas ion source and a hot wire plasma enhanced discharging device on the basis of enhanced magnetic filtered arc ion plating (MFAIP) equipment; a special protection layer with a corrosion resistance under a corrosive medium environment is added between a workpiece substrate and a surface coating, and the materials of the protection layer are determined through experimental verification according to the ligand field theory of corrosion resistant alloy; the middle protection layer and the topmost surface precision coating are prepared by applying the MFAIP method adopting the large-area gas ion source and the hot wire plasma enhanced discharging device, so that large particles can be filtered so as to greatly reduce the particle size and quantity, defects like shrinkage porosity and pinholes of the coating can be effectively eliminated, the binding force and the surface quality of the coating can be improved enormously, and a hardware product after being treated can meet the performance requirement of long-time service under various corrosive environments.

Description

technical field [0001] The invention belongs to the technical field of surface modification of metal materials, and relates to equipment and a method for depositing high-quality precision coatings by arc ion plating. Background technique [0002] As the mainstream technology in the field of surface engineering technology, wet electroplating based on Faraday's law of electrolysis has a history of nearly 190 years. For two centuries, electroplating technology has played a very important role in the progress of human civilization. However, in recent decades, more and more people have discovered the environmental pollution hazards caused by electroplating, including serious water pollution, air pollution and land pollution, as well as proven carcinogenic risks to humans. How to adopt a new type of green coating technology to replace the highly polluting electroplating technology is the most urgent problem facing the majority of surface engineering technology workers. Arc ion pl...

AI Technical Summary

Problems solved by technology

However, after more than ten years of hard work, no breakthrough has been made in this area so far.

Theoretically, arc ion plating has most of the conditions for preparing decorative coatings. From the perspective of actual development, some technological innovations have greatly improved the quality of coatings, such as invention patents such as ZL200610045720.5, By setting the coil magnetic field with enhanced filtering and using pulsed bias to suppress neutral particle clusters, the precision of the coating has been greatly improved, but there are still several deficiencies: one is the use of traditional plasma sputtering The spray cleaning method cannot fully activate the surface of the substrate to the extent of chemical activation, resulting in the bonding strength between the coating and the substrate being much lower than the strength of the substrate; second, the coating deposited by arc ion plating is generally in the order of microns in thickness. There are inevitably pinholes and porosity, which will cause corrosive media to pass through the pinholes and directly contact the substrate of the workpiece, resulting in ulcerative corrosion, which is mainly reflected in decorative coatings such as sanitary ware, lamps, clocks, and auto parts. The salt spray and other medium corrosion tests do not meet the requirements of the experimental standards; the third is that the coating materials used for the surface coating are mostly electroplating materials, such as chromium, nickel and their alloys, or compound ceramic coatings used on various tools. layer materials, which cannot meet the corrosion resistance requirements in marine environments or more harsh environments

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