Etchant composition, method for etching multilayered film, and method for preparing display device
A technology of composition and etching solution, which is applied in the manufacture of semiconductor/solid-state devices, electrical components, circuits, etc., can solve the problems of deterioration of operating environment, change of etching rate, dissolution of resist, etc., to prevent etching residues or precipitates, The effect of maximizing linearity and reducing the amount of waste liquid
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manufacture example 1
[0112] Production example 1: Fabrication of titanium / copper / titanium / glass substrate
[0113] A layer made of titanium (metal) is formed by sputtering titanium on a glass substrate (size: 150mm×150mm) Next, a layer made of copper (metal) is formed by sputtering copper After that, a layer made of titanium (metal) is formed by sputtering titanium Thus, a three-layer film structure of titanium / copper / titanium is produced. A resist was applied thereto, a line pattern mask (line width: 20 μm) was exposed and transferred, and developed to form a resist pattern, thereby producing a titanium / copper / titanium / glass substrate.
manufacture example 2
[0114] Production example 2: Production of copper / titanium / glass substrate
[0115] A layer made of titanium (metal) is formed by sputtering titanium on a glass substrate (size: 150mm×150mm) Next, a layer made of copper (metal) is formed by sputtering copper In this way, a copper / titanium 2-layer structure is produced. A resist was applied thereto, a line-shaped pattern mask (line width: 20 μm) was exposed and transferred, and developed to form a resist pattern, thereby producing a copper / titanium / glass substrate.
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