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VC/a-C:H nano-composite coating on substrate surface and preparation method of VC/a-C:H nano-composite coating

A nano-composite coating and composite coating technology, applied in the surface field, can solve the problems of inapplicable precision, substrate size change, thick coating thickness, etc., and achieve simple and easy preparation methods, high hardness and self-lubrication, The effect of good self-lubrication

Active Publication Date: 2017-05-31
宁波奥深科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, TD processing has its inherent disadvantages: ①The processing temperature is high, which requires high heat resistance of the substrate; ②The high temperature causes serious dimensional changes and deformation of the substrate, so it is not suitable for high-precision workpieces; ③It is difficult to achieve Partial coating; ④The thickness of the coating is thicker, which affects the accuracy of the workpiece; ⑤The surface condition after the coating is poor, and generally requires post-processing (such as polishing, etc.) before it can be used
However, at present, there are few studies on the preparation of VC coatings by PVD method, and they are not systematic enough. The impact of performance, and the application research of VC coating prepared by PVD method is very lacking

Method used

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  • VC/a-C:H nano-composite coating on substrate surface and preparation method of VC/a-C:H nano-composite coating
  • VC/a-C:H nano-composite coating on substrate surface and preparation method of VC/a-C:H nano-composite coating
  • VC/a-C:H nano-composite coating on substrate surface and preparation method of VC/a-C:H nano-composite coating

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0047] In the present embodiment, the substrate is GCr15 bearing steel, and the VC / a-C:H composite coating is prepared on the surface of the substrate, and the preparation method is as follows:

[0048] (1) Pre-plating treatment

[0049] Put the substrate in petroleum ether, and clean it with ultrasonic stirring for 15 minutes. After removing the oil on the surface of the substrate, put it into acetone and ultrasonically clean it for 15 minutes, then ultrasonically clean it in absolute ethanol for 15 minutes, and finally take it out and blow it dry with nitrogen.

[0050] (2) Bias reverse sputter cleaning

[0051] Put the substrate treated in step (1) into the multi-arc ion plating chamber, the temperature of the chamber is 350°C, and the back vacuum is pre-evacuated to 4.00×10 -3 Pa; then, pass Ar gas with a purity greater than or equal to 99.999% into the cavity, the Ar gas flow rate is 100 sccm, the substrate is applied with a negative bias voltage, and the substrate is co...

Embodiment 2

[0065] In the present embodiment, the matrix is ​​exactly the same as that in Example 1, and the VC / a-C:H composite coating is prepared on the surface of the matrix, and the preparation method is as follows:

[0066] (1) is the same as step (1) in Example 1.

[0067] (2) is the same as step (2) in Example 1.

[0068] (3) is the same as step (3) in Example 1.

[0069] (4) Deposition of VC / a-C:H composite coating

[0070] Keep the Ar gas flow constant, and then pass C with a purity greater than or equal to 99.9% into the cavity 2 h 2 As a reactive gas, the flow rate is 100sccm, and the vacuum degree is maintained at 1.20Pa; the V target current is increased to 65A, the deposition temperature is maintained at 400°C, and a bias voltage of -150V is applied to the substrate to deposit VC / a-C:H composite coating on the substrate surface , deposition time 120min.

[0071] (5) is the same as step (5) in Example 1.

[0072] The cross-section SEM figure of the above-mentioned VC / a-...

Embodiment 3

[0080] In the present embodiment, the matrix is ​​exactly the same as that in Example 1, and the VC / a-C:H composite coating is prepared on the surface of the matrix, and the preparation method is as follows:

[0081] (1) is the same as step (1) in Example 1.

[0082] (2) is the same as step (2) in Example 1.

[0083] (3) is the same as step (3) in Example 1.

[0084] (4) Deposition of VC / a-C:H composite coating

[0085] Keep the Ar gas flow constant, and then pass C with a purity greater than or equal to 99.9% into the cavity 2 h 2 As a reactive gas, the flow rate is 50sccm, and the vacuum degree is maintained at 1.0Pa; the V target current is increased to 65A, the deposition temperature is maintained at 400°C, and a bias voltage of -150V is applied to the substrate to deposit VC / a-C:H composite coating on the substrate surface , deposition time 120min.

[0086] (5) is the same as step (5) in Example 1.

[0087] The cross-section SEM figure of the above-mentioned VC / a-C:...

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Abstract

The invention provides a VC / a-C:H nano-composite coating, which is prepared from hard-phase nanocrystal VC and lubricating-phase amorphous a-C:H, wherein the a-C:H is taken as a matrix and the nanocrystal VC is dispersed into the matrix, so that the characteristics of high hardness and low abrasion of a traditional VC hard coating are kept, meanwhile, the VC / a-C:H nano-composite coating has excellent self-lubricating characteristics of the a-C:H material, can play a good protecting role on a substrate operating in high-abrasion and high-friction environments and has good application value. The invention further provides a preparation method. A multi-arc ion plating technology is adopted, a metal V is taken as a target material, C2H2 is taken as a reaction gas, the content of a V element and a C element in the coating can be regulated and controlled through controlling the gas flow of V target current and / or a carbon source C2H2, so that the contents of a VC phase and an a-C:H phase in the coating are regulated and controlled.

Description

technical field [0001] The invention relates to the field of surface technology, in particular to a VC / a-C:H nanocomposite coating on the surface of a substrate and a preparation method thereof. Background technique [0002] Vanadium carbide (VC) is one of the most important functional materials among transition metal carbides. It has a series of excellent properties, such as high strength, high hardness, high temperature resistance, acid and alkali resistance, wear resistance, small specific gravity and good stability. And good electrical and thermal conductivity. VC has high hardness and good wear resistance, and is often used as a surface strengthening layer material and is widely used in the field of tooling and molds. As a tool coating, VC also has excellent properties such as low friction coefficient, low thermal conductivity and high corrosion resistance, and the V formed on its surface during use 2 o 5 With self-lubricating effect, it can significantly reduce the ...

Claims

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Application Information

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IPC IPC(8): C23C14/32C23C14/16C23C14/06C23C14/02
CPCC23C14/0021C23C14/025C23C14/0605C23C14/0635C23C14/16C23C14/325
Inventor 姜欣王永欣鲁侠李金龙王立平
Owner 宁波奥深科技有限公司
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