High-sensitivity pH value biosensor chip
A sensor chip and high-sensitivity technology, applied in biochemical equipment and methods, microbial measurement/inspection, instruments, etc., can solve the problems of complicated testing process, large testing equipment, long testing time, etc., to ensure the shrinkable characteristics, Reduce inspection time and achieve low-cost results
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[0055] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0056] Figure 4 based on silicon nitride (Si 4 N 3 ) structure diagram of the ion sensitive field effect transistor (105) of the passivation layer (106), its structure is the same as that of the metal-oxide semiconductor field effect transistor (MOSFET), but the gate (108) of the ion sensitive field effect transistor (105) in a floating state. The electrode (103) (Ag / AgCl) in the solution (104) provides bias voltage (V ref ), so that the ion sensitive field effect transistor (105) works in the sub-threshold region. Since silicon nitride (Si 4 N 3 ) passivation layer (106) contains chemical molecules SiOH and SiNH 2 Can react with the hydrogen ion in the solution (104), the chemical reaction formula is as follows:
[0057]
[0058]
[0059]
[0060] where H S + represents hydrogen ions on the surface of the passivation layer (106). Passiva...
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