Carbon-based antifriction wear resistant coat and production method thereof
A wear-resistant coating, carbon-based technology, applied in coatings, chemical instruments and methods, metal material coating technology, etc., can solve the problems of difficult erosion/corrosion characteristics, anti-friction and wear-resisting characteristics, long life, and limited bearing capacity etc. to achieve the effect of improving corrosion/erosion resistance
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[0034] The present invention also provides a method for preparing the above-mentioned carbon-based anti-friction and wear-resistant coating, which includes the following steps: pre-treating the substrate 100; performing plasma cleaning on the surface of the pre-treated substrate 100; The above-mentioned carbon-based anti-friction and wear-resistant coating is deposited on the surface of the substrate 100 . Generally, the base 100 in the present invention is a friction pair component for water environment, such as a hard-sealed valve, a water-lubricated bearing, and a water environment gear transmission member. Depositing the carbon-based anti-friction and wear-resistant coating of the present invention on the working surface of the substrate 100 can obtain a workpiece with excellent tribological properties.
[0035] In the preparation method of the present invention, the purpose of pretreatment and plasma cleaning is to expose the substrate 100 to a fresh surface, so that the ...
Embodiment approach
[0037] As a possible embodiment, the plasma cleaning includes the following steps: placing the pre-treated substrate 100 on the sample holder in the vacuum chamber of the magnetron sputtering system, and vacuuming it; -3 When Pa and below, enter Ar gas and adjust the air pressure to 1Pa~10Pa; turn on the bias power supply, adjust the bias voltage to 500V~1000V, and the bias duty ratio to 40%~60%; Excited into plasma, the surface of the pretreated substrate 100 is etched, and the etching time is 5 minutes to 50 minutes. Plasma cleaning is to use high-energy particles to bombard the surface of the substrate 100, which can remove stubborn stains or scale remaining in the pretreatment, so that the surface of the substrate 100 has a higher degree of cleanliness and enhance the deposition quality of subsequent coatings.
[0038] Compared with the graphite-like amorphous carbon coating, the bonding layer 200 in the present invention has better compatibility with the friction pair par...
Embodiment 1
[0047] The carbon-based anti-friction and wear-resistant coating is prepared on the hard sealing surface of the titanium alloy ball valve. In this embodiment, the substrate 100 is a titanium alloy ball valve, the bonding layer 200 is a metal Ti film, and the metal Ti film and graphite-like amorphous carbon film are alternately deposited to form a composite coating with a thickness of 45 μm. The specific implementation steps are as follows:
[0048] 1) Pretreatment
[0049] Use ordinary detergent to treat the substrate 100 to remove oil stains on the hard sealing surface of the titanium alloy ball valve and impurities absorbed during processing, transportation or long-term storage; then sandblast the hard sealing surface of the titanium alloy ball valve, Remove the oxide film and machining burrs; then use an industrial cleaning agent to ultrasonically clean the hard sealing surface of the titanium alloy ball valve to further remove the physical and chemical adsorbates on the su...
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