Schottky gate array type terahertz modulator
A Schottky gate and terahertz technology, applied in the field of terahertz applications, can solve the problems of low operating frequency, small modulation depth, and low modulation rate of terahertz modulators, achieve large range, reduce transmission loss, and high operating frequency Effect
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[0025] The working process of the present invention is illustrated by an example of a Schottky grid array terahertz modulator with a grid period of 120 μm and a grid width of 50 μm:
[0026] The structure of the device is as figure 1 As shown, epitaxially grown on a semi-insulating GaAs substrate with a thickness of 2 μm and a doping concentration of 3×10 16 cm -3 n-type doped gallium arsenide, etched gate steps with a period of 120 μm and a step width of 50 μm on the epitaxial layer to form a doped gallium arsenide epitaxial layer and gate steps with a height of 1 μm, the number of grids for 10 pcs. A 10nm-thick titanium and 100nm gold film is plated on the top of each gate-type step to form a stepped metal grid array; the same metal film is also plated on the doped gallium arsenide epitaxial layer to form a base metal grid array with a width of 60 μm, and the stepped metal grid The grid spacing is 5 μm. The base metal grid array is connected in series through the positiv...
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