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Low-temperature co-fired ceramic baseplate material

A low-temperature co-fired ceramic and ceramic substrate technology, which is applied in the field of electronic substrate materials, can solve the problems of high sintering temperature and achieve excellent dielectric properties, cost reduction, and low dielectric constant

Active Publication Date: 2013-09-11
HUAZHONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] Patent document CN102432280A discloses that the main crystal phase is 3ZnO·B 2 o 3 Invention of the zinc-boron ceramic substrate material and its preparation method, but the sintering temperature of this material system is relatively high at 950-1000°C

Method used

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  • Low-temperature co-fired ceramic baseplate material
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  • Low-temperature co-fired ceramic baseplate material

Examples

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preparation example Construction

[0013] The preparation method of the low-temperature co-fired ceramic substrate material provided by the present invention comprises the following steps:

[0014] Step 1 Combine ZnO with H 3 BO 3 Mix evenly in a dry environment;

[0015] Step 2: Heat the mixture at room temperature at 1.5-3°C / min to 680-750°C and keep it warm for 1-2 hours;

[0016] Step 3 Add CaCO 3 with TiO 2 Put it into a ball mill jar and add deionized water for ball milling, the ball milling time is 2 to 3 hours, and then dry;

[0017] Step 4: Raise the temperature of the dried mixture to 1280-1320°C at 3-5°C / min, and keep it warm for 2-3 hours;

[0018] Step 5 Put the two pre-burned materials into a ball mill tank and add deionized water for ball milling. The ball milling time is 2 to 3 hours, and then dry;

[0019] The 6th step uses the mass fraction to be 6~8% polyvinyl alcohol solution as binding agent, and the addition amount of binding agent is 8~10% of the mass of the mixture to be granulated...

example 1

[0022] 3ZnO·B 2 o 3 with CaTiO 3 The preparation of the composite powder:

[0023] 1. H 3 BO 3 Mix with ZnO according to the ratio in Table 1, the total mass is 400 grams, grind it in an agate mortar for about 1 hour until mixed evenly, and put it in a 500ml corundum crucible.

[0024] 2. Put the corundum crucible with uniformly mixed oxides into the bell furnace, raise it from room temperature to 750°C at a speed of 3°C / min, and keep it warm for 1 hour. The pre-fired material is ground into powder with a mortar.

[0025] 3. Add CaCO 3 with TiO 2 According to the ingredients in Table 1, the total mass is 40 grams, and an appropriate amount of deionized water is added to a ball mill tank equipped with agate balls to mill for 2 hours. After discharge, it is dried at 110°C and sieved with a 60-mesh sieve.

[0026] 4. Put the powder sieved in step 3 into a 100ml corundum crucible and place it in a bell furnace, raise it to 1320°C at a speed of 5°C / min, and keep it warm for...

example 2~20

[0032] The raw materials and formula of each example are as shown in table 1, and its preparation method is identical with example 1.

[0033] The dielectric properties of the above experimental samples were measured with an Agilent E5701C network analyzer, and the results are shown in Table 2.

[0034] (Note: CT is CaTiO 3 , wt% is the percentage of the total mass of mixed powder. Each example is further divided into four small examples, and the difference between each small example is that the mass percentages of CT are 3%, 6%, 9% and 12% respectively. )

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Abstract

The invention discloses a low-temperature co-fired ceramic used as a baseplate material. The ceramic baseplate material comprises a material formulation composed of ZnO, H3BO3, CaCO3 and TiO2; a main crystalline phase of the fired ceramic baseplate material is 3ZnO.B2O3, and CaB2O4 and Zn2TiO4 are the secondary phases. The preparation method of the ceramic baseplate material comprises the following steps of: prefiring H3BO3 and ZnO to synthesize 3ZnO.B2O3 powder; prefiring CaCO3 and TiO2 to synthesize CaTiO3 powder; then mixing the synthesized 3ZnO.B2O3 powder with CaTiO3 powder to obtain the low-temperature co-fired baseplate material powder, wherein the CaTiO3 accounts for 3 to 12% of the total mass; processing the powder by adding deionized water for ball milling, drying, granulating and sintering to obtain the high-performance ceramic baseplate material. The sintering temperature of the material system is preferably 840 to 880 DEG C; the microwave dielectric performance within the preferable sintering temperature range is as follows: the dielectric constant ER ranges from 7 to 8, Q*F=11,000-22,600GHz, and the co-firing can be done with Ag. The performance requirement for the low-temperature co-fired ceramic baseplate material can be met.

Description

technical field [0001] The invention belongs to the field of electronic substrate materials, and in particular relates to a low-temperature co-fired ceramic substrate material. Background technique [0002] Low-temperature co-fired ceramic materials, as the key basic materials in low-temperature co-fired technology, have stricter performance requirements than ordinary microwave dielectric ceramics. The series of dielectric constant (2 ~ 2000), and as the substrate material, usually requires the material to have a low dielectric constant to shorten the delay time of signal propagation between chips; have a high quality factor to ensure excellent frequency selection characteristics and reduce insertion loss at high frequencies; it has a near-zero resonant frequency temperature coefficient to ensure the thermal stability of the device. (2) In terms of technology, a lower sintering temperature is required, generally lower than 900°C, to achieve low-temperature co-firing with so...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/453C04B35/63
Inventor 傅邱云胡云香周东祥刘欢郑志平赵俊罗为刘婷
Owner HUAZHONG UNIV OF SCI & TECH
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