Selective iron etching solution and etching method
An etching solution and selective technology, applied in the field of selective iron etching solution and etching, can solve the problems such as the inability to meet the clean environment of the IC carrier board, the release of irritating gases, etc., and achieve stable etching rate, small side erosion, and iron corrosion. fast effect
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Embodiment 1
[0025] Dilute 136ml concentrated sulfuric acid (98%) with deionized water to 800ml, add 90g sodium m-nitrobenzene sulfonate to fully dissolve it, then add 0.5g triethanolamine and 1g n-octanol, and finally dilute to 1L with deionized water , That is, a selective iron etching solution with an acid content of 5mol / L is obtained.
Embodiment 2
[0027] According to the same preparation method as Example 1, except that the concentrated sulfuric acid (98%) used in the etching solution is 55ml, sodium m-nitrobenzene sulfonate is 220g, triethanolamine is 0.5g, and n-octanol is 1.5 g, finally diluted to 1L with deionized water to obtain a selective iron etching solution with an acid content of 2mol / L.
Embodiment 3
[0029] According to the same preparation method as Example 1, except that the concentrated sulfuric acid (98%) used in the etching solution is 272ml, sodium m-nitrobenzene sulfonate is 4g, and hexamethylenetetramine is 0.5g and 2g. The n-octanol is finally diluted to 1L with deionized water to obtain a selective iron etching solution with an acid content of 10mol / L.
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