Selective iron etching solution and etching method

An etching solution and selective technology, applied in the field of selective iron etching solution and etching, can solve the problems such as the inability to meet the clean environment of the IC carrier board, the release of irritating gases, etc., and achieve stable etching rate, small side erosion, and iron corrosion. fast effect

Active Publication Date: 2015-03-25
KUNSHAN CITY BANMING ELECTRONICS SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although this etching solution has the advantages of strong etching ability, high etching rate, and good uniformity in a large area, and the corrosion rate of this type of etching solution on copper is low, irritating gas is released during use. Unable to meet the clean environment required for IC substrate production

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0025] Dilute 136ml concentrated sulfuric acid (98%) with deionized water to 800ml, add 90g sodium m-nitrobenzene sulfonate to fully dissolve it, then add 0.5g triethanolamine and 1g n-octanol, and finally dilute to 1L with deionized water , That is, a selective iron etching solution with an acid content of 5mol / L is obtained.

Embodiment 2

[0027] According to the same preparation method as Example 1, except that the concentrated sulfuric acid (98%) used in the etching solution is 55ml, sodium m-nitrobenzene sulfonate is 220g, triethanolamine is 0.5g, and n-octanol is 1.5 g, finally diluted to 1L with deionized water to obtain a selective iron etching solution with an acid content of 2mol / L.

Embodiment 3

[0029] According to the same preparation method as Example 1, except that the concentrated sulfuric acid (98%) used in the etching solution is 272ml, sodium m-nitrobenzene sulfonate is 4g, and hexamethylenetetramine is 0.5g and 2g. The n-octanol is finally diluted to 1L with deionized water to obtain a selective iron etching solution with an acid content of 10mol / L.

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PUM

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Abstract

The invention discloses selective iron etching solution, comprising 4-250g / L of a water-soluble aromatic nitro-compound, 2-10mol / L of inorganic acid, 0.1-2g / L of a corrosion inhibitor and the balance of deionized water. A novel selective etching system is adopted; the etching method is fast in iron etching speed, stable in etching speed, even in etched surface, small in side corrosion, regular in side boundary and small in copper etching speed; the iron etching speed and the copper etching speed are greater than or equal to 200; the etching solution does not contain the materials with large volatility, such as hydracids or nitric acid; the etching solution is greener and more environment-friendly; and the etching solution is suitable for selective etching of the surface of a copper base material, and is also suitable for refined processing of carbon steel or low-alloy steel and members thereof.

Description

Technical field [0001] The invention relates to the technical field of metal surface etching processing, in particular to a selective iron etching solution and an etching method. Background technique [0002] With the rapid development of the electronics industry, IC carrier boards have become an important electronic product. The manufacturing process of the carrier is varied. Copper plating on iron substrates is an important process for making carrier boards. The process principle is: first copper-plating on one side of the cold-rolled carbon steel sheet, that is, the iron substrate to form a contour pattern, and then using a chemical etching method to remove the iron substrate to retain the pure copper contour pattern, and further processing to form a carrier board. [0003] There have been many reports on the iron chemical etching solution: the patent publication number CN101173360A discloses an etching solution for stainless steel, the main components include ferric chloride,...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23F1/28C23F1/02
Inventor 陈修宁李建王扩军黄志齐黄京华王淑萍
Owner KUNSHAN CITY BANMING ELECTRONICS SCI & TECH
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