High-entropy alloy coating preparation technology of tool die
A high-entropy alloy and preparation process technology, applied in metal material coating process, coating, ion implantation plating, etc. The effect of improved toughness and high temperature stability
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Embodiment 1
[0018] In this example, firstly, nickel (Ni), cobalt (Co), iron (Fe), chromium (Cr), and titanium (Ti) are prepared in an equimolar ratio to prepare a NiCoFeCrTi high-entropy alloy material, and NiCoFeCrTi high-entropy alloy material is prepared in the configuration. For entropy alloy materials, the vacuum arc melting method is used to repeatedly melt 4 to 5 times for preparation.
[0019] Then, using the NiCoFeCrTi high-entropy alloy material and a single element material as target materials, a high-entropy alloy nitride film coating is sputtered on a hard alloy substrate by radio frequency magnetron sputtering. This process can be tried in different Under the parameters of power, substrate temperature and different nitrogen flow rates, the specific parameter data can be obtained through a limited number of experiments; in this embodiment, the single element material is molybdenum (Mo), and the high-entropy alloy nitride film coating The layer is (NiCoFeCrTi) x Mo y N, wher...
Embodiment 2
[0023] In this example, firstly, nickel (Ni), cobalt (Co), iron (Fe), chromium (Cr), and titanium (Ti) are prepared in an equimolar ratio to prepare a NiCoFeCrTi high-entropy alloy material, and NiCoFeCrTi high-entropy alloy material is prepared in the configuration. For entropy alloy materials, the vacuum arc melting method is used to repeatedly melt 4 to 5 times for preparation.
[0024] Then, using the NiCoFeCrTi high-entropy alloy material and a single element material as target materials, a high-entropy alloy nitride film coating is sputtered on a hard alloy substrate by radio frequency magnetron sputtering. This process can be tried in different Under the parameters of power, substrate temperature and different nitrogen flow rates, the specific parameter data can be obtained through a limited number of experiments; in this embodiment, the single element material is aluminum (Al), and the high-entropy alloy nitride film coating The layer is (NiCoFeCrTi) x al y N, where ...
Embodiment 3
[0029] In this example, firstly, nickel (Ni), cobalt (Co), iron (Fe), chromium (Cr), and titanium (Ti) are prepared in an equimolar ratio to prepare a NiCoFeCrTi high-entropy alloy material, and NiCoFeCrTi high-entropy alloy material is prepared in the configuration. For entropy alloy materials, the vacuum arc melting method is used to repeatedly melt 4 to 5 times for preparation.
[0030] Then, using the NiCoFeCrTi high-entropy alloy material and a single element material as target materials, a high-entropy alloy nitride film coating is sputtered on a hard alloy substrate by radio frequency magnetron sputtering. This process can be tried in different Under the parameters of power, substrate temperature and different nitrogen flow rates, the specific parameter data can be obtained through a limited number of experiments; in this embodiment, the single element material is silicon (Si), and the high-entropy alloy nitride thin film coating The layer is (NiCoFeCrTi) x Si y N, wh...
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Abstract
Description
Claims
Application Information
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