CN-MCN superhard self-lubricating nano-composite coating and preparation method thereof
A nano-composite coating and composite coating technology, which is applied in coating, metal material coating process, vacuum evaporation plating, etc., can solve the problems of large stress and peeling of CN coating, so as to reduce stress and avoid cracking , the effect of reasonable structural design
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Embodiment 1
[0042] Example 1: At 50°C, at 0.005Pa, a transition metal Ti layer with a thickness of 10 nanometers was deposited under the conditions of -800V; in a nitrogen environment, at 0.3Pa, at -100V conditions, a transition layer TiN with a thickness of 100 nanometers was deposited; and then at 0.1Pa , under the condition of -50V, acetylene was gradually introduced under the condition of ensuring the nitrogen flow rate, and the acetylene flow rate was gradually increased until the ratio of acetylene to nitrogen was 1:1, and a 100 nm thick support layer TiCxN was deposited; then under the nitrogen and acetylene environment, - 1 micron CN-TiCN superhard self-lubricating coating was deposited under 50V bias and 0.5Pa air pressure; the coating hardness was controlled at 35GPa, the friction coefficient was lower than 0.20, and the total coating thickness was 1.21 microns. Cool naturally after preparation to obtain a CN-TiCN superhard self-lubricating nanocomposite coating. The TiCN grains...
Embodiment 2
[0043] Example 2: At 100°C, deposit a transition metal Cr layer with a thickness of 20 nanometers at 0.1Pa and -900V; in a nitrogen environment, deposit a transition layer CrN with a thickness of 200 nanometers at 0.4Pa and at -150V; then deposit at 0.2Pa, Under the condition of -60V, acetylene is gradually introduced under the condition of nitrogen flow rate, and the acetylene flow rate is gradually increased until the ratio of acetylene to nitrogen is 1:1, and a 200 nm thick support layer CrCxN is deposited; then under nitrogen and acetylene environment, -60V Deposit 2 micron CN-CrCN superhard self-lubricating coating under the condition of bias voltage and 0.6Pa air pressure; the hardness of the coating is controlled at 35-40GPa, the friction coefficient is lower than 0.20, and the total thickness of the coating is 2.42 microns. Cool naturally after preparation to obtain a CN-CrCN superhard self-lubricating nanocomposite coating. The CrCN grains in the lubricating layer are...
Embodiment 3
[0044] Example 3: At 250°C, deposit an 80nm thick transition metal Mo layer at 0.02Pa, -900V; in a nitrogen environment, deposit an 800nm thick transition layer MoN at 1Pa, -150V; then deposit at 1Pa, -150V Under the conditions, acetylene was gradually introduced under the condition of nitrogen flow rate, and the acetylene flow rate was gradually increased until the ratio of acetylene to nitrogen was 1:1, and a support layer MoCxN with a thickness of 1500 nanometers was deposited; then under nitrogen and acetylene environment, -150V bias 1.5 micron CN-MoCN superhard self-lubricating coating is deposited under 1.5Pa air pressure; the coating hardness is controlled at 35-40GPa, the friction coefficient is lower than 0.20, and the total coating thickness is 3.88 microns. Cool naturally after preparation to obtain CN-MoCN superhard self-lubricating nanocomposite coating. The MoCN grains in the lubricating layer are nanocrystals with a grain size of 10nm, CN is an amorphous phase...
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