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Low temperature co-fired ceramic (LTCC)-based metamaterial harmonic oscillator and manufacturing method thereof

A harmonic oscillator and metamaterial technology, applied in the field of filters, can solve the problems of high loss and difficulty in mastering, and achieve the effects of reducing loss, reducing sintering temperature, and preventing delamination and warping

Active Publication Date: 2012-09-19
KUANG CHI INST OF ADVANCED TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the LTCC process is difficult to master, and there are many technical problems
For example, sintering in unpressurized air leads to delamination and warping; in order to protect the lower sintering temperature (<the melting point of Ag-Pd alloy), some low melting point sintering aids must be added, and the sintering aids lead to high loss

Method used

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  • Low temperature co-fired ceramic (LTCC)-based metamaterial harmonic oscillator and manufacturing method thereof
  • Low temperature co-fired ceramic (LTCC)-based metamaterial harmonic oscillator and manufacturing method thereof

Examples

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preparation example Construction

[0019] A kind of preparation method of the metamaterial harmonic oscillator based on LTCC, described preparation method comprises the following steps: as figure 1 shown

[0020] a. Making nano-ceramic powder into ceramic slurry, and casting it into a green ceramic belt with a thickness of 20 μm to 200 μm;

[0021] Wherein the nano-ceramic powder can be prepared by the sol-gel method, and can also be prepared by other methods;

[0022] b. Use a screen printing of more than 325 mesh to form a green ceramic sheet with multiple metal microstructures;

[0023] c. Put the green ceramic sheets into the ordinary mold and stack them to form a whole, and then discharge the glue, that is, under the condition of low temperature (<500°C) and no pressure, the organic matter is volatilized in the furnace, and then put into a high temperature resistant mold Form a pre-fired whole;

[0024] d. Put the pre-fired whole into a sintering furnace and heat press it to make a metamaterial resonato...

Embodiment 1

[0028] ZnNb made by sol-gel method 2 o 6 Nano-ceramic powder, and make ceramic slurry from nano-ceramic powder;

[0029] Cast the ceramic slurry into a green ceramic belt with a thickness of 20 μm, and use a 350-mesh screen to print a number of metal microstructures with a specific shape such as an I-shape to form a green ceramic sheet. The metal used is silver paste or the content of palladium is low. silver palladium paste;

[0030] Put the green ceramic sheets into the ordinary mold and stack them to form the whole adhesive discharge, that is, under the condition of low temperature (<500 ℃) and no pressure, the organic matter is volatilized in the furnace, and then put into the high temperature resistant mold to form the pre-set. Burn the whole;

[0031] The pre-fired whole is put into a sintering furnace and hot-pressed for 0.5-2 hours, and then cooled to obtain a metamaterial resonator, wherein the hot-pressing pressure is 28MPa and the temperature is 900°C.

Embodiment 2

[0033] Preparation of BaTi by sol-gel method 4 o 9 Nano-ceramic powder, and make ceramic slurry from nano-ceramic powder;

[0034] Cast the ceramic slurry into a green ceramic belt with a thickness of 100 μm, and use a 400-mesh screen to print multiple metal microstructures with specific shapes such as I-shaped to form a green ceramic sheet. The metal used is silver paste or palladium content is low silver palladium paste;

[0035] Put the green ceramic sheets into the ordinary mold and stack them to form the whole adhesive discharge, that is, under the condition of low temperature (<500 ℃) and no pressure, the organic matter is volatilized in the furnace, and then put into the high temperature resistant mold to form the pre-set. Burn the whole;

[0036] The pre-fired whole is put into a sintering furnace and hot-pressed for 0.5-2 hours, and then cooled to obtain a metamaterial resonator, wherein the hot-pressing pressure is 28MPa and the temperature is 920°C.

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Abstract

The invention provides a low temperature co-fired ceramic (LTCC)-based metamaterial harmonic oscillator and a manufacturing method thereof. The manufacturing method comprises the following steps of: preparing ceramic slurry from nano ceramic powder, and casting to prepare a green tape; manufacturing a metal microstructure on the green tape to form green ceramic chips through screen printing; superposing the green ceramic chips, putting the green ceramic chips into a mold after tape ranking to form a presintering whole; and performing hot-pressing and cooling the presintering whole to obtain the metamaterial harmonic oscillator. Because the nano-powder has high sintering property, the sintering temperature of the nano ceramic powder can be reduced in the process of preparing the metamaterial harmonic oscillator from the nano ceramic powder; and therefore, a sintering aid is not added into the nano ceramic powder or a small amount of sintering aids can be added into the nano ceramic powder so as to realize low-temperature co-firing, and the loss of the metamaterial harmonic oscillator is reduced; by the hot-pressing technology, the phenomena of layering and warping in the sintering process are avoided, and the sintering temperature is lower than the traditional pressureless sintering temperature under the pressure conditions, and the sintering temperature is reduced further.

Description

【Technical field】 [0001] The invention relates to the field of filters, in particular to an LTCC-based metamaterial harmonic oscillator and a preparation method thereof. 【Background technique】 [0002] Metamaterials are materials that can modulate electromagnetic waves developed in the past ten years. Metamaterials are generally composed of a certain number of metal microstructures attached to a substrate with certain mechanics and electromagnetism. These microstructures with specific patterns and materials can modulate electromagnetic waves of specific frequency bands passing through them. [0003] Metamaterial resonators refer to microwave ceramic resonators containing metal microstructures, which are used to make small-volume high-performance filters. Metamaterial resonators generally use a low-temperature co-firing process, that is, sintering under pressure-free conditions. However, the LTCC process is difficult to master, and there are many technical difficulties. Fo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01P11/00H01P7/00
Inventor 刘若鹏徐冠雄缪锡根
Owner KUANG CHI INST OF ADVANCED TECH
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