Method for preparing large-grain ingot polycrystal silicon
A large-grain, polysilicon technology, applied in the field of preparing large-grain ingot polysilicon, can solve the problems of narrow process window, unfavorable large-scale promotion, inability to induce polycrystalline growth, etc., and achieve the effect of coarse grains
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Embodiment 1
[0031] Embodiment 1. A silicon carbide film was placed on the bottom of a quartz crucible sprayed with a silicon nitride release agent. The thickness of the silicon carbide film was 80 μm, and the average grain size of the silicon carbide film was 100 mm. After charging 450 kg of silicon material into the crucible, the crucible was loaded into a furnace. The furnace is evacuated, and Ar is used as the protective gas. Design the thermal field so that the temperature of the silicon material in the furnace is higher than 1420°C but lower than 1480°C, so that the silicon material is completely melted, and the silicon carbide film will not melt because of its high melting point (>2800°C). After the silicon material is fully melted, open the insulation cover, adjust the thermal field, gradually solidify from the bottom of the crucible, rely on the induction of large grains of silicon carbide film to achieve directional growth of silicon crystals, and obtain large grain castings with...
Embodiment 2
[0033] Example 2. A boron nitride film was placed on the bottom of a quartz crucible sprayed with a silicon nitride release agent. The thickness of the boron nitride film was 60 μm, and the average grain size of the boron nitride film was 150 mm. After charging 450 kg of silicon material into the crucible, the crucible was loaded into a furnace. The furnace is evacuated, and Ar is used as the protective gas. Design the thermal field so that the temperature of the silicon material in the furnace is higher than 1420°C but lower than 1480°C, so that the silicon material is completely melted, and the boron nitride film will not melt because of its high melting point (>2900°C). After the silicon material is fully melted, open the heat preservation cover, adjust the thermal field, gradually solidify from the bottom of the crucible, rely on the induction of large grains of boron nitride film to achieve directional growth of silicon crystals, and obtain large grains with an average gr...
Embodiment 3
[0035] Example 3. A tantalum carbide film was placed on the bottom of a quartz crucible sprayed with a silicon nitride release agent. The thickness of the tantalum carbide film was 50 μm, and the average grain size of the boron nitride film was 250 mm. After charging 450 kg of silicon material into the crucible, the crucible was loaded into a furnace. The furnace is evacuated, and Ar is used as the protective gas. Design the thermal field so that the temperature of the silicon material in the furnace is higher than 1420°C but lower than 1480°C, so that the silicon material is completely melted, and the tantalum carbide film will not melt because of its high melting point (>3600°C). After the silicon material is fully melted, open the insulation cover, adjust the thermal field, gradually solidify from the bottom of the crucible, rely on the induction of large grains of tantalum carbide film to realize the directional growth of silicon crystals, and obtain large grain castings w...
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