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Method for processing tail gas and dust generated by producing trichlorosilane

A technology of trichlorosilane and treatment method, applied in separation methods, chemical instruments and methods, dispersed particle separation, etc., can solve problems such as air pollution and large porosity, and achieve water saving, high work efficiency, and nitrogen consumption. Effect

Active Publication Date: 2011-04-27
江西宏柏新材料股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In the production process of trichlorosilane, after condensation treatment in the tail gas produced, there are still a small amount of trichlorosilane, silicon tetrachloride, hydrogen chloride and unreacted silicon powder in the tail gas. Pass the tail gas through a bag filter to intercept the dust. However, due to the small dust particles of silicon powder and the large void ratio, a certain amount of hydrogen chloride gas will be mixed in the dust, which has a strong hydrogen chloride smell. If the dust is not further processed processing will cause air pollution, for this reason, the present invention proposes the following technical solutions

Method used

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  • Method for processing tail gas and dust generated by producing trichlorosilane
  • Method for processing tail gas and dust generated by producing trichlorosilane
  • Method for processing tail gas and dust generated by producing trichlorosilane

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Embodiment 1

[0043] The treatment method of tail gas dust in the production process of trichlorosilane, the tail gas and dust in the production process of trichlorosilane first pass through the cyclone separator, and the tail gas dust separated by the cyclone separator is first collected by the filter device to obtain dust, and the dust passes through two Step bag filter treatment, in the bag filter, a cloth bag blowpipe is set to blow out nitrogen, and the cloth bag blowpipe is installed on the main pipe by the main pipe arranged at the bottom of the filter and parallel to the filter bag and the filter bag. The branch pipe between the pipes and the nozzles arranged on the branch pipes; the branch pipes are distributed in the gaps between all the filter bags, so that all the bags can be blown by the branch pipes, and the height of the branch pipes is 1 / 2 from the bottom to the top of the bag. Four nozzles are evenly arranged vertically on the branch pipe, the time for blowing nitrogen is 1-...

Embodiment 2

[0047] The treatment method of tail gas dust in the production process of trichlorosilane, the tail gas dust in the production process of trichlorosilane first passes through the cyclone separator, the tail gas dust separated by the cyclone separator is first collected by the filter device to obtain dust, and the dust passes through the two-step bag In the two bag filters, there are cloth bag blowpipes, and the bag blowpipes blow out nitrogen to blow off the dust deposited on the bags. The main pipe is parallel to the branch pipe between the filter bags and the nozzles arranged on the branch pipe; the branch pipe is distributed in the gap between all the filter bags, so that all the cloth bags can be blown by the branch pipe, and the height of the branch pipe is At the upper 1 / 3 from the bottom to the top of the cloth bag, 5 nozzles are arranged vertically and evenly on the branch pipe, the time for nitrogen blowing is 1 second, the frequency of nitrogen blowing is 60 times / hou...

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Abstract

The invention relates to a method for producing trichlorosilane and equipment thereof, in particular to a processing method of dust generated in the producing process of trichlorosilane and equipment thereof. The mixture of the tail gas and the dust in the producing process of the trichlorosilane is processed through a filtering device, the intercepted dust is then processed through a bag filter in two steps, at least one cloth-bag blowing pipe for blowing out nitrogen is arranged in the bag filter for processing the dust, and the cloth-bag blowing pipe comprises a main pipe, a branch pipe and at least one nozzle, wherein the main pipe is arranged at the bottom or the top of the filter, a branch pipe is installed on the main pipe and is parallel between filtering bags and the nozzle is arranged on the branch pipe; and at least one dust blowing pipe is arranged at the dust inlet of the bag filter, the dust blowing pipe is used for blowing out the nitrogen, and the dust is deposited at the bottom of the bag filter after being blown dispersedly. The processing method of the tail gas and the dust of the invention can realize continuous operation, saves the usage amount of the nitrogen, reduces the discharge of pollutants, and can be used for producing byproducts containing ammonium chloride.

Description

technical field [0001] The invention relates to a method and equipment for producing trichlorosilane, in particular to a method and equipment for treating tail gas dust in the production process of trichlorosilane. Background technique [0002] Trichlorosilane is an organosilicon monomer with a wide range of uses. It is mainly used as a raw material for the production of semiconductor silicon, single crystal silicon and polycrystalline silicon. It is widely used in various fields of national defense, national economy and even people's daily life. Trichlorosilane is also An important raw material for the production of silane coupling agents and other organosilicon compounds. [0003] Due to the needs of environmental protection, it is necessary to treat the waste gas produced in the production process of trichlorosilane, which can reduce pollution, and recycle and reuse the components in the waste gas, which not only reduces the production cost of the enterprise, but also red...

Claims

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Application Information

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IPC IPC(8): B01D46/04B01D46/42
Inventor 郎丰平邱顺恩黄少辉黄小明李明生
Owner 江西宏柏新材料股份有限公司
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