Multilayer film for low load working condition of micro electro mechanical system and preparation method thereof
A micro-electromechanical system and multi-layer thin film technology, which is applied to the components of TV systems, the process for producing decorative surface effects, generators/motors, etc., can solve the problem of damage to silicon materials, insufficient pressure resistance of self-assembled films, Device failure and other issues
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0029] CHCl 3 , ethanol and acetone (analytically pure) were ultrasonically cleaned in sequence to remove organic impurities, and then put them into HCl and H 2 o 2 Soak in the aqueous solution for 5-10 minutes, remove the surface oxide layer, and then put in water, ammonia water and H at a volume ratio of 6:1:1 2 o 2 Carry out hydroxylation reaction, the concentration of ammonia water is 30%, the reaction mechanism is as follows figure 2 After the reaction, rinse with deionized water and dry in a fume hood after cleaning.
[0030] Dissolve the commercially available silane coupling agent KH-560 containing ethoxy and amino groups in toluene to form a 1% solution by mass, then put the cleaned silicon sample into the solution and soak for 30 minutes, Make KH-560 (molecular formula NH 2 (CH 2 ) 3 Si(OC 2 h 5 ) 3 ) in the ethoxy group and the silicon surface to generate Si-O-Si grafts, so that the silane coupling agent is connected to the silicon substrate 4 through che...
PUM
Property | Measurement | Unit |
---|---|---|
thickness | aaaaa | aaaaa |
surface roughness | aaaaa | aaaaa |
hardness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com