High-temperature low-friction CrAlSiON nanometer composite coating and preparation method thereof
A nano-composite coating, low friction technology, applied in coating, metal material coating process, ion implantation plating and other directions, can solve the problems that are not conducive to the widespread use of coatings, increase equipment and process costs, and high friction coefficient , to improve the anti-friction and wear performance and thermal stability, reduce the coefficient of friction, and improve the bonding force of the coating
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Embodiment 1
[0026] A high-temperature and low-friction CrAlSiON nanocomposite coating is composed of a CrN transition layer and a CrAlSiON functional layer. The atomic percent content of each element in the CrN transition layer is: Cr: 75at.%, N: 25at.%. The atomic percent content of each element in the CrAlSiON functional layer is: Al: 20at.%, Cr: 10at.%, Si: 12at.%, O: 5at.%, N: 53at.%.
[0027] Polish the cemented carbide, ultrasonically clean it with acetone and alcohol for 10 minutes, dry it with nitrogen, and put it into a vacuum chamber. Turn on the heater to raise the temperature to 300°C, and evacuate the vacuum chamber to a vacuum degree of 1.0×10 -3 Below Pa. 300 sccm of Ar gas was introduced, the bias voltage of the workpiece support was set to -1000V, and the surface of the substrate was cleaned by sputtering, and the bombardment time was 10 minutes. Afterwards, the bias voltage was reduced to -600V, the Cr target was ignited, the target current was 150A, and the substrate...
Embodiment 2
[0031] A high-temperature and low-friction CrAlSiON nanocomposite coating is composed of a CrN transition layer and a CrAlSiON functional layer. The atomic percentage content of each element in the CrN transition layer is: Cr: 70at.%, N: 30at.%. The atomic percent content of each element in the CrAlSiON functional layer is: Al: 25at.%, Cr: 15at.%, Si: 10at.%, O: 15at.%, N: 35at.%.
[0032] Polish the cemented carbide, ultrasonically clean it with acetone and alcohol for 15 minutes, then dry it with nitrogen and put it into a vacuum chamber. Turn on the heater to raise the temperature to 350°C, and evacuate the vacuum chamber to a vacuum degree of 5.0×10 -3 Below Pa. Introduce 250 sccm of Ar gas, set the bias voltage of the workpiece support to -800V, and perform sputter cleaning on the surface of the substrate, and the bombardment time is 20 minutes. Afterwards, the bias voltage was reduced to -800V, the Cr target was ignited, the target current was 120A, and the substrate w...
Embodiment 3
[0035] A high-temperature and low-friction CrAlSiON nanocomposite coating is composed of a CrN transition layer and a CrAlSiON functional layer. The atomic percentage content of each element in the CrN transition layer is: Cr: 60at.%, N: 40at.%. The atomic percent content of each element in the CrAlSiON functional layer is: Al: 30at.%, Cr: 20at.%, Si: 5at.%, O: 30at.%, N: 25at.%. Polish the cemented carbide, ultrasonically clean it with acetone and alcohol for 15 minutes, then dry it with nitrogen and put it into a vacuum chamber. Turn on the heater to raise the temperature to 400°C, and evacuate the vacuum chamber to a vacuum degree of 5.0×10 -3 Below Pa. 300 sccm of Ar gas was introduced, the bias voltage of the workpiece support was set at -900V, and the surface of the substrate was cleaned by sputtering, and the bombardment time was 15 minutes. Afterwards, the bias voltage was reduced to -700V, the Cr target was ignited, the target current was 100A, and the substrate was...
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