The invention relates to a source-drain symmetric and interchangeable double-bracket-shaped grid-controlled tunneling
transistor and a manufacturing method thereof. The source-drain symmetric and interchangeable double-bracket-shaped grid-controlled tunneling
transistor is provided with a folding auxiliary grid, a double-bracket grid and structural features which are symmetric on the left side andthe right side. The source-drain symmetric and interchangeable double-bracket-shaped gate-controlled tunneling
transistor is strong in grid control capability, and a
voltage-controlled heavily-dopedsource-drain interchangeable region of a source-drain interchangeable
electrode can be adjusted to be a source region or a drain region. In this way, the direction of the
tunneling current is changed.According to the invention, the advantages of bidirectional switch function, low static
power consumption, low
reverse leakage current, relatively strong grid control capability, low sub-threshold amplitude swing and the like are realized. Compared with a common
MOSFET type device, more excellent switching characteristics are achieved through the tunneling effect. Compared with a common tunnelingfield effect transistor, source-drain symmetric and interchangeable two-way switch characteristics, which cannot be realized by the common
tunneling field effect transistor, can be realized by the source-drain symmetric and interchangeable double-bracket-shaped grid-controlled tunneling transistor. Therefore, the source-drain symmetric and interchangeable double-bracket-shaped grid-controlled tunneling transistor is suitable for popularization and application.