5968results about "Chucks" patented technology

Electronic device fabrication processes, apparatuses and systems for flowable gap fill or flowable deposition techniques are described. In some implementations, a semiconductor fabrication chamber is described which is configured to maintain a semiconductor wafer at a temperature near 0° C. while maintaining most other components within the fabrication chamber at temperatures on the order of 5-10° C. or higher than the wafer temperature.

A surgical device comprising an adapter assembly is disclosed. The adapter assembly selectively interconnects a loading unit and a device housing, and includes at least one drive converter assembly for interconnecting a rotatable drive shaft and an axially translatable drive member of the loading unit. The at least one drive converter assembly converts and transmits a rotation of the rotatable drive shaft to an axial translation of the axially translatable drive member of the loading unit. The at least one drive converter assembly includes a drive element, a drive nut, and a distal drive member. The drive element defines a longitudinal axis. The drive nut is disposed about the longitudinal axis, and the distal drive member is disposed along the longitudinal axis.

A wafer pedestal of a semiconductor apparatus is provided. The wafer pedestal is capable of supporting a substrate. The wafer pedestal includes a pedestal having at least one purge opening configured to flow a purge gas and at least one chucking opening configured to chuck the substrate over the pedestal. The pedestal includes a sealing band disposed between the at least one purge opening and the at least one chucking opening. The sealing band is configured to support the substrate.

A substrate supporting structure (50) for semiconductor processing, comprising a mounting table (51) for placing a processed substrate (W) disposed in a processing chamber (20), wherein temperature control spaces (507) for storing the fluid used as a heat exchange medium are formed in the mounting table (51), a conductive transmission path (502) is disposed to lead a high frequency power to the mounting table (51), and flow channels (505, 506) feeding or discharging the heat exchange medium fluid to or from the temperature control spaces (507) are formed in the transmission path (502).

A pedestal assembly and method for controlling temperature of a substrate during processing is provided. In one embodiment, the pedestal assembly includes a support member that is coupled to a base by a material layer. The material layer has at least two regions having different coefficients of thermal conductivity. In another embodiment, the support member is an electrostatic chuck. In further embodiments, a pedestal assembly has channels formed between the base and support member for providing cooling gas in proximity to the material layer to further control heat transfer between the support member and the base, thereby controlling the temperature profile of a substrate disposed on the support member.

A medical instrument has an instrument insert and an instrument handle, which are detachably connected to one another. An actuation rod of the instrument insert is releasably connectable to a movable grip of the instrument handle via a locking connection. A blocking element is provided which blocks the movable grip when the actuation rod has been released.

The present invention is directed at a handheld power tool comprising means for receiving a tool accessory; means for rotating said tool accessory; and at least one quick connect means for use with power tool attachments.

A tool for gripping and removing mechanical fasteners such as pedicle screws. With reference to FIG. 7, the device generally resembles a screwdriver, having a handle on one end, a long shaft in the middle, and fastener engaging means on the other end. The fastener engaging means comprises a set of two or more jaws having inward facing gripping surfaces positioned to grasp the external surfaces of a screw head. The jaws are formed as part of a collet slidably mounted within an outer thread sleeve. The thread sleeve is attached to the shaft. A tapered journal on the collet interacts with a tapered bore in the thread sleeve so that when the collet is pulled into the thread sleeve, the set of two or more jaws are squeezed together. The threaded engagements between the collet and the thread sleeve should be the reverse of the thread on the screw to be removed; i.e., if a right-hand screw is to be removed then the threaded engagement between the collet and the thread sleeve should be made with a left-hand thread. In operation, the jaws are placed over the screw head and the device is rotated in a counterclockwise direction (for removal of a screw with a right-hand thread). The inward facing surfaces on the jaws bear against the bolt head, thereby impeding the rotation of the collet relative to the thread sleeve. The left-hand threaded engagement between the collet and the thread sleeve therefore pulls the collet further into the thread sleeve, whereupon the tapered bore squeezes the jaws more tightly together. Thus, the reader will appreciate, applying torque to the device when it is in position on a screw head simultaneously torques the screw head and squeezes the jaws more tightly together. The inward facing surfaces are also provided with an undercut in order to accommodate axial misalignment between the jaws and the screw head.

A surgical instrument for the dissection of bone and other tissue includes a spindle, a dissection tool and a male member carried by the spindle. The spindle includes a cavity. The dissection tool is releasably received in the cavity. The dissection tool extends along an axis and includes a first end and a second end with the first end having a cutting element and a second end having a generally cylindrical cross-section and a centrally located aperture partially extending along the axis. The male member is carried by the spindle and extends into the aperture of the dissection tool. The cavity may define a drive portion and a tool receiving aperture. One or more alignment projections may extend from the drive portion into the tool receiving aperture.

A locking instrument assembly for use in conjunction with an intramedullary device is disclosed. The locking instrument assembly includes an inner collet, an outer body, and a knob. The inner collet has a collar and a fastener member. The knob engages the fastener member to press the outer body against the collar. As the knob mates with the fastener member, the collar applies a clamping force to the intramedullary device.

A surgical handpiece with a rotating spindle for receiving the coupling head of a surgical attachment or a cutting accessory. A gear train has plural drive heads that simultaneously rotate at different speeds. A clutch assembly has pins that move along the length of the spindle. The clutch assembly sets the position of the pins so they will engage one of the drive heads. The spindle rotates with the drive head with which the clutch pins are engaged.

A “snap-in” bit chuck assembly for a rotary hand or powered tool, includes a body having a hex shank at its rearward end and a retraction collar slidably disposed on the body. The body has a coaxial hex socket formed therein to allow a tool bit to be inserted thereinto. A coil spring biases the retraction collar forwardly and biases a retaining clip toward the bottom of an angular slot formed in the body. The bit is removed by sliding the retraction collar rearwardly, to compress the coil spring and allow the retaining clip to retract back up the slot. The bit is biased out of a locked position by a plunger that ensures that the bit remains disengaged when the retraction collar is released.

An apparatus for control of a temperature of a substrate has a temperature-controlled base, a heater, a metal plate, a layer of dielectric material. The heater is thermally coupled to an underside of the metal plate while being electrically insulated from the metal plate. A first layer of adhesive material bonds the metal plate and the heater to the top surface of the temperature controlled base. This adhesive layer is mechanically flexible, and possesses physical properties designed to balance the thermal energy of the heaters and an external process to provide a desired temperature pattern on the surface of the apparatus. A second layer of adhesive material bonds the layer of dielectric material to a top surface of the metal plate. This second adhesive layer possesses physical properties designed to transfer the desired temperature pattern to the surface of the apparatus. The layer of dielectric material forms an electrostatic clamping mechanism and supports the substrate.