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Transparent conductive film for flat panel displays

a technology of transparent conductive film and flat panel display, which is applied in the direction of superimposed coating process, synthetic resin layered products, instruments, etc., can solve the problems of difficult control of chemical etching process, inability to manufacture such films by continuous process on flexible substrates, and inability to meet the requirements of continuous production, etc., to achieve high optical transmittance, low electrical resistance, and superior properties

Inactive Publication Date: 2007-02-01
XYLON LLC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

[0023] Another aspect of the present invention is a composite film formed by a process according to the present invention. Typically, a composite film formed according to the present invention has superior properties, including high optical transmittance, low electrical resistance, high surface smoothness, high stability to exposure to high temperature and high humidity, high interlayer adhesion, and wet and dry etchability.

Problems solved by technology

Unfortunately, chemical etching processes are often difficult to control, especially for plastic films.
Such processes are also not well-suited for production of the films in a continuous, roll-to-roll manner, on plastic substrates.
Previous methods of manufacturing such films have not succeeded in manufacturing such films by a continuous process on flexible substrates, yielding films with desirable properties such as high transmittance, low electrical resistance, and stability to temperature and humidity.
However, the deposition process for these multilayered films is much more complicated than the deposition process for ITO / Ag / ITO films.
However, the deposition of these films was only performed on a rigid glass substrate.
The Ag or Ag / Au alloy is susceptible to oxidation when exposed to air and in the presence of water and electrical voltage.
Under these conditions, the metal tends to diffuse.
This can cause electrical short circuits or visible stains, which damages the appearance of the display.
Unless the metal is protected in some manner, the oxidation or corrosion might start from this location.

Method used

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  • Transparent conductive film for flat panel displays
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  • Transparent conductive film for flat panel displays

Examples

Experimental program
Comparison scheme
Effect test

example 1

Roll-To-Roll Deposition and Characterization of ITO / APC / ITO Films

I. Deposition and Characterization

[0095] Substrate material was Lintec Arton coated with hard coating (HC / Arton). Table 1 lists the properties of the Lintec Arton. The hard coating on Lintec Arton has a surface composition of 35 at % C, 45 at % 0, and 20 at % Si, excluding hydrogen, and contains UV cured polyester acrylate and colloidal silica.

Properties of HC / Arton sheetSur-T %Thick-faceBarrierSurface(@Mate-nessRMSTg(g / m2 / day)energy550rialGRADE(μm)(nm)(C)(° C. / RH)(mN / M)nm)HC / CHC-1881.317131.436.391.4ArtonPN188W(40 / 100)(Lintec)PFW

[0096] Deposition experiments were carried out using Avery Sputtering System with the DC magnetron sputtering mode and the roll-to-roll substrate transportation.

[0097] The base pressure of the deposition chamber was 1.54×10-3 mT, and the working or deposition pressure was 2.4-3.1 mT. Prior to film deposition, the plastic roll was purged with Ar+O2 plasma to modify the surface chemistry o...

example 2

Roll-To-Roll Deposition and Characterization of ICO / APC / ICO Films

I. Deposition and Characterization

[0127] Substrate material was the Lintec Arton coated with hard coating (HC / Arton). The hard coating has a surface composition of 35 at % C, 45 at % 0, and 20 at % Si, excluding hydrogen, and contains uv cured polyester acrylate and colloidal silica. The properties of HC / Arton are listed in Table 1, above, in Example 1.

[0128] Deposition experiment was carried out using Avery Sputtering System with the DC magnetron sputtering mode and the roll-to-roll substrate transportation.

[0129] The base pressure of the deposition chamber was 1.5-4×10−3 mT, and the working or deposition pressure was 2.4-3.1 mT. Prior to film deposition, the plastic roll was purged with Ar+O2 plasma to modify the surface chemistry of plastic materials. The sputtering power of 1200 W and the gas flow-rate ratio of O2 / Ar of 5 / 50 sccm were used for the plasma purging.

[0130] An In2O3-10% CeO2 target was sputtered w...

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Abstract

Transparent conductive films for flat panel displays and methods for producing them are disclosed. In general, a method according to the present invention comprises: (1) providing a flexible plastic substrate; (2) depositing a multi-layered conductive metallic film on the flexible plastic substrate by a thin-film deposition technique to form a composite film, the multi-layered conductive metallic film comprising two layers of an alloy selected from the group consisting of indium cerium oxide (InCeO) and indium tin oxide (ITO) surrounding a layer of an alloy of silver, palladium, and copper (Ag / Pd / Cu); and (3) collecting the composite film in continuous rolls. Typically, the thin-film deposition technique is DC magnetron sputtering. Another aspect of the invention is a composite film produced by a method according to the present invention. Still another aspect of the invention is a composite film comprising a multilayered film as described above formed on a flexible plastic substrate, wherein the composite film has a combination of properties including: transmittance of at least 80% throughout the visible region; an electrical resistance of no greater than about 10 Ω / square; a root-mean-square roughness of no greater than about 2.5 nm; and an interlayer adhesion between the multi-layered metallic film and the remainder of the composite film that is sufficiently great to survive a 180° peel adhesion test.

Description

FIELD OF THE INVENTION [0001] The present invention relates generally to transparent conductive layers (TCL) used for flat panel displays, solar panels, emissive backlight constructions, and the like. GENERAL BACKGROUND AND STATE OF THE ART [0002] A liquid crystal display (LCD) is a type of flat panel display used in various electronic devices. Generally, LCDs comprise two sheets of polarizing material with a liquid crystal solution therebetween. Each sheet of polarizing material typically comprises a substrate of glass or transparent plastic; a liquid crystal (LC) is used as optical switches. The substrates are usually manufactured with transparent electrodes, typically made of indium tin oxide (ITO) or another conductive metallic layer, in which electrical “driving” signals are coupled. The driving signals induce an electric field which can cause a phase change or state change in the LC material, the LC exhibiting different light-reflecting characteristics according to its phase a...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): B32B9/04B32B27/42C23C14/02C23C14/08C23C14/20C23C28/00G02F1/1333G02F1/1343H01L51/52
CPCC23C14/025C23C14/086C23C14/205G02F1/133305Y10T428/265H01L51/5206H01L51/5221H01L2251/5338G02F1/13439Y10T428/31507Y10T428/31504Y10T428/31942H10K2102/311H10K59/80517H10K59/80524H10K50/816H10K50/828
Inventor SASAKI, YUKIHIKOHE, XIAO-MING
Owner XYLON LLC
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