Method of producing a sheet comprising through pores and the application thereof in the production of micronic and submicronic filters
A through-hole and masking layer technology, applied in the production of through-hole foil and its application in the production of micron and sub-micron filters, can solve the problems of high raw material cost, unstable corrosion resistance, limitations, etc., and achieve high Productivity, high separation reliability, effect of eliminating clogging
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[0067] exist figure 1 , the upper part of the figure is a vertical cross-sectional view of a part of the foil including the cells, and the lower part of the figure is a partial top view of the foil.
[0068] As an example, the foil is a metal foil, such as molybdenum foil, having a thickness of 10 microns, and the holes form a square grid (array), each hole having a diameter of 0.5 microns and a depth of 10 microns (i.e. a form factor of 20) , the interval is 0.5 microns, that is, the unit area density is 10 8 hole / cm 2 .
[0069] Implement the following steps to manufacture the grid ( figure 2 ):
[0070] (1) depositing a masking layer M consisting of an aluminum layer with a thickness of 1 micrometer on the foil F;
[0071] (2) Depositing a photosensitive resin layer R with a thickness of 1.2 microns on the masking layer;
[0072] (3) transfer the grid image to the resin R by interference method, and develop the resin by microelectronic technology;
[0073] (4) using...
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