Silicon carbide material polishing method
A silicon carbide and silicon carbide slurry technology, applied in the polishing field, can solve the problems of shortening the practical life of components, low polishing and grinding efficiency, unstable polishing process, etc., and achieves the effect of reducing polishing cost, good polishing effect and improving smoothness.
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Embodiment 1
[0029] Stir the 800-mesh, 1200-mesh and 1500-mesh silicon carbide micropowder with the polyethylene glycol and chlorate mixture respectively to obtain silicon carbide polishing slurries of different specifications. Wherein the molar concentration of chlorate in the silicon carbide polishing slurry is 1mol / L, and the content of silicon carbide is 40wt%. Polish the parts with the prepared polishing slurry of different specifications. The polishing slurry made of 800 mesh silicon carbide powder is polished at a speed of 600r / min; the polishing slurry made of 1200 mesh silicon carbide powder is polished at a speed of 600r / min; 1500 mesh The polishing slurry made of silicon carbide powder was polished at a speed of 400r / min; finally, ultra-fine polishing was performed with diamond micropowder at a speed of 300r / min to achieve the polishing effect, and the final roughness after polishing was Ra≤0.05μm.
Embodiment 2
[0031] Stir 800-mesh, 1200-mesh and 1500-mesh silicon carbide micropowder with ethylene glycol and nitrate mixture to obtain silicon carbide polishing slurries of different specifications. Wherein the molar concentration of nitrate in the silicon carbide polishing slurry is 4mol / L, and the content of silicon carbide is 55wt%. Polish the parts with the prepared polishing slurry of different specifications. The polishing slurry made of 800 mesh silicon carbide powder has a polishing speed of 800r / min; the polishing slurry made of 1200 mesh silicon carbide powder has a polishing speed of 800r / min; 1500 mesh The polishing slurry made of silicon carbide powder was polished at a speed of 600r / min; finally, ultra-fine polishing was performed with diamond micropowder at a speed of 500r / min to achieve the polishing effect, and the final roughness after polishing was Ra≤0.05μm.
Embodiment 3
[0033] Stir 800-mesh, 1200-mesh and 1500-mesh silicon carbide micropowder with ethylene glycol and inorganic peroxide mixtures to obtain silicon carbide polishing slurries of different specifications. The molar concentration of inorganic peroxide in the silicon carbide polishing slurry is 2.5mol / L, and the content of silicon carbide is 47.5wt%. Polish the parts with the prepared polishing slurry of different specifications. The polishing slurry made of 800 mesh silicon carbide powder is polished at a speed of 700r / min; the polishing slurry made of 1200 mesh silicon carbide powder is polished at a speed of 700r / min; 1500 mesh The polishing slurry made of silicon carbide powder was polished at a speed of 500r / min; finally, ultra-fine polishing was performed with diamond micropowder at a speed of 400r / min to achieve the polishing effect, and the final roughness after polishing was Ra≤0.05μm.
[0034] The beneficial effects of the present invention are:
[0035] The polishing met...
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