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Method for preparing ceramic multilayer film on metal surface by chemical heat treatment

A chemical heat treatment, metal surface technology, applied in metal material coating process, coating, vacuum evaporation plating and other directions, can solve the problems of lack of mutual diffusion of elements, difficult to achieve metallurgical bonding, etc., to achieve high grain boundary bonding force, improve Interface bonding strength and comprehensive mechanical properties, the effect of high bonding strength

Active Publication Date: 2021-11-09
XIAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The invention provides a method for preparing a ceramic multilayer film on a metal surface by using chemical heat treatment, which solves the problem that the interlayer interface and the film base interface of the current ceramic / ceramic multilayer film lack interdiffusion of elements, and it is difficult to realize metallurgical bonding, and significantly improves the multilayer film. The interfacial bonding strength of the multilayer film, thereby improving the comprehensive mechanical properties of the multilayer film

Method used

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  • Method for preparing ceramic multilayer film on metal surface by chemical heat treatment

Examples

Experimental program
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Effect test

Embodiment 1

[0040] This example includes the following steps:

[0041] Step 1: Pretreat the surface of the metal tungsten (W) substrate that needs surface strengthening, and prepare a multilayer film with niobium (Nb) / tantalum (Ta) by magnetron sputtering.

[0042] Step 1.1: Prepare a metal tungsten (W) plate with a purity of 99.9wt.%. Surface treat the tungsten plate, grind and polish it with sandpaper, and then clean it with acetone and alcohol in ultrasonic waves.

[0043] Step 1.2: Alternately deposit niobium (Nb) and tantalum (Ta) metal layers on the metal tungsten substrate by magnetron sputtering to form a Nb / Ta multilayer film, with a total of 30 layers and a total thickness of 30 microns.

[0044] Step 2: Carry out high-temperature heat treatment on the sample prepared with the multilayer film. The heat treatment temperature is 2000 degrees Celsius, and the heat treatment holding time is 0.5 hour. After the heat treatment, the sample is cooled to room temperature with the furnace...

Embodiment 2

[0048] This example includes the following steps:

[0049] Step 1: Pretreat the surface of the titanium alloy (Ti6Al4V) plate that needs surface strengthening, and prepare a multilayer film with tungsten (W) / tantalum (Ta) by cathode arc ion plating method.

[0050] Step 1.1: Prepare a titanium alloy (Ti6Al4V) plate, surface treat the titanium alloy plate, grind and polish it with sandpaper, and then clean it with acetone and alcohol in ultrasonic waves.

[0051] Step 1.2: Alternately depositing tungsten (W) and tantalum (Ta) metal layers on the titanium alloy substrate by cathodic arc ion plating to form a W / Ta multilayer film with a total thickness of 5 microns.

[0052] Step 2: Perform high-temperature heat treatment on the sample prepared with the multilayer film. The heat treatment temperature is 900 degrees Celsius, and the heat treatment holding time is 48 hours. After the heat treatment, the sample is cooled to room temperature with the furnace.

[0053] Step 3: Carbur...

Embodiment 3

[0056] This example includes the following steps:

[0057] Step 1: Pretreat the surface of the metal molybdenum (Mo) substrate that needs surface strengthening, and prepare a molybdenum (Mo) / zirconium (Zr) multilayer film by using a cathodic arc ion plating method.

[0058] Step 1.1: Prepare a molybdenum (Mo) plate, surface treat the molybdenum plate, grind and polish it with sandpaper, and then clean it with acetone and alcohol in ultrasonic waves.

[0059] Step 1.2: Alternately deposit molybdenum (Mo) and zirconium (Zr) metal layers on the molybdenum substrate by cathodic arc ion plating to form a Mo / Zr multilayer film, with a total of 15 layers and a total thickness of 15 microns.

[0060] Step 2: Perform high-temperature heat treatment on the sample prepared with the multilayer film. The heat treatment temperature is 1500 degrees Celsius, and the heat treatment holding time is 24 hours. After the heat treatment, the sample is cooled to room temperature with the furnace.

...

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Abstract

The invention discloses a method for preparing a ceramic multilayer film on a metal surface by chemical heat treatment. The method comprises the following steps: firstly, preparing a metal / metal multilayer film with carbide or nitride or nitride forming ability on the surface of a metal matrix needing surface strengthening by utilizing a physical vapor deposition method; then performing high-temperature heat treatment on a sample to promote mutual diffusion of metal element layers; lastly, performing carburizing treatment or nitriding treatment or nitriding treatment on the sample, and making the sample react with metal along with inward diffusion of carbon or nitrogen, so that the metal / metal multilayer film is converted into a carbide / carbide nitride / nitride multilayer film; and finally forming a ceramic / ceramic multilayer film on the surface of the matrix. Compared with the prior art, the method has the advantages that mutual diffusion of metal elements of an interlayer interface can be promoted, a high-strength interlayer interface and a film-based interface which are metallurgically bonded are formed, and the comprehensive mechanical property of a film layer is remarkably improved.

Description

technical field [0001] The invention belongs to the technical field of metal material surface treatment methods, and in particular relates to a method for preparing a ceramic multilayer film on a metal surface by chemical heat treatment. Background technique [0002] The increasing range of applications of transition metal materials requires increasing requirements for their surface strength, hardness and wear resistance. For example, for tungsten-based alloys used for friction stir welding, improving the surface strength, hardness and wear resistance can not only prolong the service life of equipment parts, but also help improve welding quality. The preparation of ceramic / ceramic multilayer films on the surface of transition metals is one of the effective means to improve their surface strength, hardness and wear resistance, that is, two ceramic layers are alternately prepared on the surface of transition metals, and the high hardness and wear resistance of the two ceramic ...

Claims

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Application Information

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IPC IPC(8): C23C14/58C23C14/16
CPCC23C14/5806C23C14/5846C23C14/586C23C14/5893C23C14/16
Inventor 赵梓源曹龙赵明轩钟黎声李均明许云华
Owner XIAN UNIV OF TECH
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