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A High Sensitivity Surface Acoustic Wave Nitrogen Dioxide Sensor

A surface acoustic wave and nitrogen dioxide technology, which is used in the analysis of fluids using sonic/ultrasonic/infrasonic waves, material analysis using sonic/ultrasonic/infrasonic waves, instruments, etc. The small response range of the device can shorten the response/recovery time, increase the adsorption site, and promote the diffusion effect.

Active Publication Date: 2021-11-05
HUNAN UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] In recent years, research on SAW sensors has emerged in an endless stream, but the currently reported NO 2 For sensors, there are still many problems, specifically in the complex processing technology of sensitive materials, small device response range, slow response recovery speed, and the need for additional heating, etc.

Method used

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  • A High Sensitivity Surface Acoustic Wave Nitrogen Dioxide Sensor
  • A High Sensitivity Surface Acoustic Wave Nitrogen Dioxide Sensor
  • A High Sensitivity Surface Acoustic Wave Nitrogen Dioxide Sensor

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Embodiment 1

[0029] see again figure 1 As shown, the present invention provides a kind of high-sensitivity surface acoustic wave nitrogen dioxide sensor, adopts double-terminal resonant type, piezoelectric substrate 1 adopts 128-YX LiNbO 3 Materials, interdigital transducer 2 and reflective grid 3 are made of gold (Au) material with a thickness of 30nm. The parameters of the SAW device are designed as follows: the wavelength is 16 m, the number of interdigital pairs is 60, the number of reflective grids is 120, and the metal The transformation rate is 0.5, the aperture is 250 times the wavelength, and the distance between the IDTs at both ends is 200 times the wavelength.

[0030] A three-dimensional porous structure composite sensitive layer 4 of reduced graphene oxide-polypyrrole doped with silver nanoparticles is placed above the piezoelectric substrate 1 . The preparation process of the three-dimensional porous structure composite sensitive layer 4 of reduced graphene oxide-polypyrrol...

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Abstract

The invention provides a high-sensitivity surface acoustic wave nitrogen dioxide sensor, which sequentially includes a piezoelectric substrate, an electrode layer, and a NO sensor by ultraviolet light irradiation. 2 Sensing composite sensitive layer with three-dimensional porous structure of silver nanoparticles doped reduced graphene oxide-polypyrrole. This application uses the 3D porous sensitive material rGO‑PPy / Ag as the sensitive film, uses Ag nanoparticles doping to improve the repeatability of the sensor, and uses ultraviolet light to irradiate the sensitive film to assist NO 2 sensing. This rGO‑PPy / Ag surface acoustic wave NO2 sensor based on UV-assisted irradiation can realize NO at room temperature 2 Sensing with high sensitivity (127.68 Hz / ppm) and fast response / recovery speed (39.7 s / 58.5 s), exhibiting good repeatability and selectivity.

Description

technical field [0001] The invention relates to the technical field of surface acoustic wave sensors in acoustic technology, in particular to a high-sensitivity surface acoustic wave nitrogen dioxide sensor. Background technique [0002] Nitrogen dioxide (Nitrogen dioxide, NO 2 ) is a toxic and harmful irritating gas, mainly from industrial waste gas, automobile exhaust, etc. It is one of the common air pollutants that destroy the ozone layer and cause acid rain. Therefore, the development of high-performance nitrogen dioxide gas sensors has always been a hot issue. Surface Acoustic Wave (SAW) devices are widely used in physical, chemical and biological detection. Since the energy of the acoustic wave is mainly concentrated on the surface, environmental variables are easily coupled with the acoustic wave, which will cause the frequency shift of the device, so it is especially suitable for Sensing and detection applications for surface interfaces. [0003] In recent years,...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N29/02
CPCG01N29/022
Inventor 周剑熊硕段辉高张定红詹正佳刘炀辉
Owner HUNAN UNIV
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