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Preparation method of high-dielectric-property copper calcium titanate epitaxial film

A technology of calcium copper titanate and epitaxial thin film is applied in the field of functional material research and technology development, which can solve the problems of complex and expensive equipment process, unfavorable industrial production, etc., and achieve the effect of simple equipment, important application value and high repeatability

Active Publication Date: 2021-07-16
ZHENGZHOU UNIVERSITY OF LIGHT INDUSTRY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] At present, the preparation methods of CCTO thin films mainly include pulsed laser deposition, magnetron sputtering, molecular beam epitaxy, sol-gel method, etc.; most of these methods require expensive equipment and complicated processes, which are not conducive to industrial production; therefore, It is necessary to find a low-cost method to prepare high-quality CCTO thin films

Method used

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  • Preparation method of high-dielectric-property copper calcium titanate epitaxial film
  • Preparation method of high-dielectric-property copper calcium titanate epitaxial film
  • Preparation method of high-dielectric-property copper calcium titanate epitaxial film

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Experimental program
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Effect test

Embodiment 1

[0034] Step 1: Preparation of CCTO sol

[0035] With calcium acetate (Ca(CH) 3 COO) 2 ) as precursor, propionic acid as complexing agent, and methanol as solvent to prepare calcium acetate sol, add calcium acetate to methanol in a glove box with a humidity of less than 30%, add propionic acid dropwise, and stir for 2 hours under heating at 40°C Dissolve to obtain a clear and transparent solution A, the molar ratio of calcium acetate: propionic acid: methanol in the solution is 1:2:10;

[0036] With copper acetate (Cu(CH) 3 COO) 2 ) as precursor, propionic acid as complexing agent, and methanol as solvent to prepare copper acetate sol. In a glove box with a humidity of less than 30%, copper acetate was added to methanol, and propionic acid was added dropwise, and stirred at 40°C for 2 hours. A blue-green translucent solution B was obtained, and the molar ratio of copper acetate: propionic acid: methanol in the solution was 1:3:10;

[0037] With tetrabutyl titanate (C 16 H...

Embodiment 2

[0045] Step 1: Preparation of CCTO sol

[0046] With calcium acetate (Ca(CH) 3 COO) 2 ) as precursor, propionic acid as complexing agent, and methanol as solvent to prepare calcium acetate sol. Calcium acetate was added to methanol in a glove box with a humidity of less than 30%, and propionic acid was added dropwise, and the solution A was obtained by stirring for 2 hours under heating at 80° C. to dissolve. The molar ratio of calcium acetate: propionic acid: methanol in the solution is 1:4:40.

[0047] With copper acetate (Cu(CH) 3 COO) 2 ) as precursor, propionic acid as complexing agent, and methanol as solvent to prepare copper acetate solution. In a glove box with a humidity of less than 30%, copper acetate was added to methanol, and propionic acid was added dropwise, and stirred for 2 hours under heating at 40-90° C. to obtain a blue-green translucent solution B. The molar ratio of copper acetate: propionic acid: methanol in the solution is 1:10:40.

[0048] With...

Embodiment 3

[0055] Step 1: Preparation of CCTO sol

[0056] With calcium acetate (Ca(CH) 3 COO) 2 ) as precursor, propionic acid as complexing agent, and methanol as solvent to prepare calcium acetate sol. Calcium acetate was added to methanol in a glove box with a humidity of less than 30%, and propionic acid was added dropwise, and the solution A was obtained by stirring for 2 hours under heating at 60° C. to dissolve. The molar ratio of calcium acetate: propionic acid: methanol in the solution is 1:3:25.

[0057] With copper acetate (Cu(CH) 3 COO) 2 ) as precursor, propionic acid as complexing agent, and methanol as solvent to prepare copper acetate sol. In a glove box with a humidity of less than 30%, copper acetate was added to methanol, and propionic acid was added dropwise, and stirred for 2 hours under heating at 60° C. to obtain a blue-green translucent solution B. The molar ratio of copper acetate: propionic acid: methanol in the solution is 1:6.5:25.

[0058] With tetrab...

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Abstract

The invention provides a preparation method of a high-dielectric-property copper calcium titanate epitaxial film, which comprises the following steps of firstly, preparing calcium, copper and titanium solutions by using a sol-gel method, and then synthesizing copper calcium titanate sol, secondly, cleaning an SrTiO3 (001) substrate, and preparing a copper calcium titanate gel film on the substrate by using a dip-coating method, and finally, carrying out heat treatment under different atmospheres and temperatures to obtain the single-orientation CCTO film. The single-orientation copper calcium titanate film is prepared on the SrTiO3 (001) substrate by using a sol-gel method with simple equipment and low cost, so that the dielectric constant of the film is improved, the dielectric loss is reduced, and the high dielectric property of the copper calcium titanate film is realized. According to the preparation method, the requirement on film preparation equipment is remarkably reduced, the repeatability is high, and the preparation method is suitable for preparing high-quality copper calcium titanate films on substrates with different shapes. The dielectric constant of the film material reaches 104, and the dielectric loss is as low as 0.01.

Description

technical field [0001] The invention relates to the field of functional material research and technical development, in particular to a preparation method of a high dielectric performance copper calcium titanate epitaxial thin film. Background technique [0002] High-quality dielectric films determine the volumetric efficiency level and charge storage capacity of passive components, which has always been one of the important topics in the microelectronics industry and related research fields. Due to the tunneling effect of quantum mechanics, the vertical scale of the capacitance is limited to around 2 nm, so the capacitance must be increased by alternately increasing the dielectric constant. In recent years, calcium copper titanate (CaCu 3 Ti 4 O 12 , CCTO for short) is considered to be the material of choice for nanoscale capacitive devices due to its huge dielectric constant and no structural phase transitions in the temperature and frequency ranges of 100–600 K and 1 k...

Claims

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Application Information

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IPC IPC(8): C04B35/462C04B35/622C04B35/624
CPCC04B35/462C04B35/624C04B35/62218C04B35/62222C04B2235/3208C04B2235/3281C04B2235/3234
Inventor 薛人中朱祥苏玉玲刘德伟张会均陈思源崔梦茹陈红炫
Owner ZHENGZHOU UNIVERSITY OF LIGHT INDUSTRY
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