Laser textured circular pit array metal ion implantation method to modify polyimide surface

A technology of metal ion implantation and polyimide, which is used in ion implantation and plating, laser welding equipment, metal processing equipment, etc., to achieve the effect of improving load bearing, improving friction and wear performance, and reducing friction coefficient

Active Publication Date: 2021-07-23
LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, with the advancement of science and technology, how to improve the wear resistance of the polyimide surface and reduce the coefficient of friction still faces difficulties

Method used

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  • Laser textured circular pit array metal ion implantation method to modify polyimide surface

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0020] (1) Ultrasonic cleaning of polyimide in polyionized water for 20 min, repeated 3 times, to remove surface pollutants;

[0021] (2) Put the cleaned polyimide into the laser processing system, and use the "single pulse at the same point multiple times" process to texture the surface of the polyimide polymer with a circular pit array: adjust the scanning speed to 5 mm / s, power 10 W, pulse frequency fixed at 15 kHz, repeated marking times 35 times;

[0022] (3) Put the polyimide with textured surface into the vacuum chamber, and vacuum to 1×10 -4 Pa; the Al target is pre-installed in the vacuum chamber as the ion implantation material;

[0023] (4) Turn on the arc power supply, adjust the current to 20 A, the duty cycle is 56%, and the generated beam current density is 0.24 A / 100cm 2 s, control the acceleration voltage -15 kV, use the Mevva-V.Ru vacuum arc ion source to implant metal Al, the injection time is 250s, take it out after the cavity is cooled, and obtain the mo...

Embodiment 2

[0026] (1) Ultrasonic cleaning of polyimide in polyionized water for 20 min, repeated 3 times, to remove surface pollutants;

[0027] (2) Put the cleaned polyimide into the laser processing system, and use the "single pulse at the same point multiple times" process to texture the surface of the polyimide polymer with a circular pit array: adjust the scanning speed to 8 mm / s, power 6 W, pulse frequency fixed at 15 kHz, repeated marking times 50 times;

[0028] (3) Put the polyimide with textured surface into the vacuum chamber, and vacuum to 1×10 -4 Pa; the Al target is pre-installed in the vacuum chamber as the ion implantation material;

[0029] (4) Turn on the arc power supply, adjust the current to 17 A, the duty cycle to 56%, and generate a beam current density of 0.19 A / 100cm 2 s, control the accelerating voltage -15 kV, use Mevva-V.Ru vacuum arc ion source to implant metal Al, the injection time is 160s, take it out after the cavity is cooled, and obtain the modified p...

Embodiment 3

[0032] (1) Ultrasonic cleaning of polyimide in polyionized water for 20 min, repeated 3 times, to remove surface pollutants;

[0033] (2) Put the cleaned polyimide into the laser processing system, and use the "single pulse at the same point multiple times" process to texture the surface of the polyimide polymer with a circular pit array: adjust the scanning speed to 2 mm / s, power 12 W, pulse frequency fixed at 15 kHz, repeated marking times 30 times;

[0034] (3) Put the polyimide with textured surface into the vacuum chamber, and vacuum to 1×10 -4 Pa; the Al target is pre-installed in the vacuum chamber as the ion implantation material;

[0035] (4) Turn on the arc power supply, adjust the current to 25 A, the duty cycle to 56%, and generate a beam current density of 0.28 A / 100cm 2 s, control the acceleration voltage -15 kV, use Mevva-V.Ru vacuum arc ion source to implant metal Al, the injection time is 80s, take it out after the cavity is cooled, and obtain the modified p...

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Abstract

The invention discloses a method for implanting metal ions into a modified polyimide surface with a laser textured circular pit array. Firstly, a laser processing system is used to apply a "single pulse with multiple intervals at the same point" process on the polyimide surface. The circular pit array texture treatment was carried out, and then the Mevva-5.Ru vacuum arc ion source was used to implant Al metal ions on the surface of the textured polyimide to obtain a modified polyimide. The friction coefficient of modified polyimide is reduced from 0.80 to about 0.20, which has low friction performance, and can be used in aviation, aerospace, microelectronics, nanometer, liquid crystal, separation film, laser and other fields, and can also be used as surface treatment for bridges and construction skateboards The new technology improves its wear resistance and lubrication performance.

Description

technical field [0001] The invention relates to a method for modifying polyimide surface friction resistance, in particular to a method for implanting metal ions into a modified polyimide surface with a laser textured circular pit array to improve the tribological properties of polyimide . Background technique [0002] Polyimide refers to a class of polymers containing imide rings (-CO-NH-CO-) on the main chain, and polymers containing phthalimide structures are the most important. Polyimide is a special engineering material with excellent high temperature resistance, chemical stability, excellent mechanical properties and electrical properties. It is often used in high-tech and high value-added fields, such as aviation, aerospace, microelectronics, nano, Liquid crystal, separation film, laser and other fields. [0003] At present, friction and wear are one of the factors restricting the high reliability and long service life of polyimide materials in high-tech and high va...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/48C23C14/02B23K26/352C08J7/12C08L79/08
CPCB23K26/355C08J7/12C08J2379/08C23C14/028C23C14/48
Inventor 张俊彦贾倩张斌王宏刚高凯雄
Owner LANZHOU INST OF CHEM PHYSICS CHINESE ACAD OF SCI
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