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Synchronous shrinkage liner tube for sintering tubular ITO target blank and preparation method thereof

A target blank and liner technology, which is applied in the sintering field of tubular ITO target products, can solve the problems of large differences in sintering shrinkage, shrinkage reduction, and uneven laying, so as to reduce sintering shrinkage resistance and overall density. Uniform distribution, increased density and uniformity effect

Active Publication Date: 2020-07-17
725TH RES INST OF CHINA SHIPBUILDING INDAL CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But the problem is that the sintering shrinkage rate of the tubular ITO target body in the vertical direction is quite different, because the lower part of the green body bears more weight than the upper part, and the sintering shrinkage is affected by the friction between the bottom of the green body and the contact surface of the setter plate. The shrinkage resistance of the whole body is different, showing that the shrinkage rate decreases in a gradient from top to bottom
Even if paving is used, the microsphere or spherical powder only plays the role of isolating the setter plate and reducing the contact area between the green body and the setter plate, which can reduce shrinkage resistance to a certain extent, but still cannot play a role in the sintering process. Synchronous shrinkage; in addition, the use of material paving during sintering is likely to cause uneven material paving, resulting in a decrease in the flatness of the tubular ITO target body, which affects the shape of the tubular ITO target to a certain extent, and also increases the preparation before sintering process

Method used

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  • Synchronous shrinkage liner tube for sintering tubular ITO target blank and preparation method thereof
  • Synchronous shrinkage liner tube for sintering tubular ITO target blank and preparation method thereof

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preparation example Construction

[0027] The synchronous shrinkage liner for sintering the tubular ITO target body and its preparation method provided by the present invention use tetragonal polycrystalline zirconia powder or barium strontium titanate powder as raw materials to prepare the liner suitable for The tetragonal polycrystalline zirconia synchronous shrinkage liner or the strontium barium titanate synchronous shrinkage liner with the sintering shrinkage rate of the tubular ITO target body can produce a synchronous shrinkage effect during sintering, thereby improving the quality of the sintered body. Its preparation method comprises the following steps:

[0028] Step 1. Ball milling: the specific surface area is 15~25m 2 g -1 tetragonal polycrystalline zirconia powder, or a specific surface area of ​​18~30m 2 g -1 The strontium barium titanate powder is used as raw material, and deionized water is added according to the target solid phase content of the slurry at 50%, and ammonia water with a conce...

Embodiment 1

[0035] Synchronous shrinkage liner for sintering of tubular ITO target green body, the preparation steps are as follows:

[0036] With a specific surface area of ​​25m 2 g -1The tetragonal polycrystalline zirconia powder is used as a raw material, and deionized water is added according to the target solid phase content of the slurry at 50%, and ammonia water with a concentration of 25% is used as a dispersant to adjust the pH value of the premix to 9, and add 1.0% of the mass of the raw material The binder PVA is mixed evenly, and then placed in a roller mill for ball milling and mixing. The lining of the ball mill tank is zirconia, and the grinding balls are zirconia balls with a diameter of 10mm. The ratio of balls to materials is 1:1, and the speed of the ball mill is 100r / min, the ball milling time is 5h, the viscosity of the tetragonal polycrystalline zirconia slurry after ball milling is 25mPa s (the rotational speed of the rotational viscometer at room temperature is ...

Embodiment 2

[0040] Synchronous shrinkage liner for sintering of tubular ITO target green body, the preparation steps are as follows:

[0041] With a specific surface area of ​​25m 2 g -1 The barium strontium titanate powder is used as raw material, and deionized water is added according to the target solid phase content of the slurry at 50%, ammonia water with a concentration of 25% is used as a dispersant, the pH value of the premix is ​​adjusted to 10, and 1.2% of the powder is added The binder PVA is mixed evenly, and then placed in a roller ball mill for ball milling and mixing. The selected ball mill tank is lined with wear-resistant polyurethane, the grinding balls are zirconia balls with a diameter of 15mm, the ball-to-material ratio is 2:1, and the ball mill speed is 150r / min, the ball milling time is 8h, the viscosity of strontium barium titanate slurry after ball milling is 27mPa s (the rotation speed of the rotational viscometer at room temperature is 20s -1 ). The strontiu...

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Abstract

The invention discloses a synchronous shrinkage liner tube for sintering a tubular ITO target blank and a preparation method thereof. A raw material for preparing the synchronous shrinkage liner tubeis tetragonal polycrystalline zirconium oxide powder with the specific surface area of 15-25 m<2>.G<-1> or barium strontium titanate powder with the specific surface area of 18-30 m<2>.G<-1>. The preparation method comprises the following steps: adding deionized water accounting for 50% of the target solid phase content of the slurry into the raw materials to obtain a mixed solution, adding a dispersing agent, regulating the pH value of the mixed solution to 9-10, adding an adhesive accounting for 1.0-1.5% of the mass of the raw materials, uniformly mixing, carrying out ball milling in a ballmill to obtain slurry, pumping the slurry into a prilling tower for prilling to obtain prilling powder, putting the prilling powder into a mold, and carrying out compression molding to obtain the synchronous shrinkage liner tube. The synchronous shrinkage liner tube plays a role in replacing spherical ceramic paving materials, and due to the fact that the shrinkage rate of the synchronous shrinkage liner tube is slightly larger than that of a tubular ITO target material blank, the effect of better reducing sintering shrinkage resistance is achieved, and preparation procedures before sinteringare reduced, so that the production operation is more convenient.

Description

technical field [0001] The invention relates to the technical field of sintering tubular ITO target products, in particular to a synchronous shrinkage liner for sintering tubular ITO target blanks and a preparation method thereof. Background technique [0002] ITO is the abbreviation of Tin-doped Indium Oxide, which refers to an indium tin oxide material. The tubular ITO target is fired from a cylindrical green body made of indium tin oxide, and the inner diameter of the green body is generally 150~200mm. , The outer diameter is 165~220mm, and the cylinder height is 300~350mm. [0003] At present, when the tubular ITO target body is sintered in China, most of them are directly placed vertically on the rectangular (porous or non-porous) SiC setter plate, or spread a layer of paving (ZrO2) on the setter plate. 2 Beads or other ceramic powders) and then place the tubular ITO target body (such as figure 1 shown) to reduce shrinkage resistance during sintering. But the problem...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/48C04B35/465C04B35/622C04B35/626
CPCC04B35/48C04B35/465C04B35/622C04B35/62695
Inventor 杨硕张大帅赵延飞
Owner 725TH RES INST OF CHINA SHIPBUILDING INDAL CORP
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