Textured diamond-like carbon-based film and preparation method thereof

A diamond and textured technology, applied in metal material coating process, ion implantation plating, coating, etc., can solve the problems of high cost and complicated process

Active Publication Date: 2020-05-12
LANZHOU UNIVERSITY OF TECHNOLOGY +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, whether it is direct texturing method or indirect ...

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  • Textured diamond-like carbon-based film and preparation method thereof
  • Textured diamond-like carbon-based film and preparation method thereof
  • Textured diamond-like carbon-based film and preparation method thereof

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preparation example Construction

[0032] The invention provides an in-situ preparation method of a textured diamond-like carbon-based film, comprising the following steps:

[0033] Fixing a metal grid on the surface of the metal base, the gap between the metal grid and the surface of the metal base is 50-200 μm, and obtaining a metal base covered with the metal grid;

[0034] Using the Cr target as a sputtering target, performing closed-field unbalanced magnetron sputtering on the metal substrate covered with a metal grid on the surface to form a Cr bonding layer;

[0035] Using the Cr target and the C target as sputtering targets, preparing Cr→Cr on the surface of the Cr bonding layer x C y Gradient transition layer, the x gradually decreases, and the y gradually increases;

[0036] With the C target as the sputtering target, in the Cr→Cr x Cy Magnetron sputtering is performed on the surface of the gradient transition layer to form a C layer to obtain the textured diamond-like carbon-based film.

[0037] ...

Embodiment 1

[0057] (1) Grind and polish the surface of the 316L stainless steel substrate step by step until the surface roughness Ra≤0.2 μm, then ultrasonically clean it with acetone and absolute ethanol for 15 minutes respectively, the ultrasonic temperature is 25°C, the ultrasonic power is 600W, and the metal substrate (1 );

[0058] ⑵Use acetone and absolute ethanol to ultrasonically clean the metal grid with a grid shape of 0.46 mm, a grid width of 0.46 mm, a grid spacing of 0.16 mm, and a thickness of 150 μm for 20 minutes, respectively, with an ultrasonic temperature of 25 ° C and an ultrasonic power of 600W, after drying with nitrogen gas, fix it on the surface of the metal substrate (1) with specific fixtures, and strictly control the gap between the metal grid and the surface of the substrate to be 100 μm.

[0059] (3) Fix the metal substrate covered with the metal grid on the surface obtained in the step (2) on the sample holder of the closed-field unbalanced magnetron sputteri...

Embodiment 2

[0065] (1) Grind and polish the surface of the 316L stainless steel substrate step by step until the surface roughness Ra≤0.2 μm, then ultrasonically clean it with acetone and absolute ethanol for 15 minutes respectively, the ultrasonic temperature is 25°C, the ultrasonic power is 600W, and the metal substrate (1 );

[0066] ⑵Use acetone and absolute ethanol to ultrasonically clean the metal grid with a grid shape of 0.3mm, a grid width of 0.3mm, a grid spacing of 0.12mm, and a thickness of 150μm for 20 minutes respectively, with an ultrasonic temperature of 25°C and an ultrasonic power of 600W, after drying with nitrogen gas, fix it on the surface of the metal substrate (1) with specific fixtures, and strictly control the gap between the metal grid and the surface of the substrate to be 100 μm.

[0067] (3) Fix the metal substrate covered with the metal grid on the surface obtained in the step (2) on the sample holder of the closed-field unbalanced magnetron sputtering system...

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Abstract

The invention provides a textured diamond-like carbon-based film and a preparation method thereof, and belongs to the field of surface engineering. According to the preparation method, a method of shielding the surface of a metal matrix through a metal mesh is provided, the textured DLC film is simply and conveniently prepared in situ, the metal mesh on the surface of the metal matrix is not tightly attached to the matrix, a certain gap is reserved between the metal mesh and the matrix, and the size of the gap is strictly controlled; the gap is utilized to realize the redistribution of plasmadensity of the deposition space, so that the plasma density at the gap between shielding region of the metal mesh and the matrix is increased, and the deposition rate at this region is increased; thedeposition rate of the non-shielded region is unchanged, so that the film thickness of the shielded region is greater than that of the non-shielded region, and a textured surface layer is formed in situ in the film deposition process; and the film itself is continuous and complete, no uncovered area exists, and the shape, the density and the depth of textured pits can be controllably adjusted through regulation and control of the deposition process.

Description

technical field [0001] The invention relates to the technical field of surface engineering, in particular to a textured diamond-like carbon-based film and a preparation method thereof. Background technique [0002] Diamond-like carbon (DLC) films have been widely used in automotive parts, cutting tools, computer electronic components, and biomedical devices due to their excellent mechanical, chemical, electronic, and tribological properties. Although the performance of DLC films is superior, the performance of DLC films has been challenged with the continuous growth of industry demand, especially the tribological properties need to be further improved. To further improve the tribological properties of DLC films, various attempts have been made, such as element or compound doping, microstructure design, and surface modification. Among them, surface texturing has great potential in improving the tribological properties of DLC films due to its simple operation, remarkable effe...

Claims

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Application Information

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IPC IPC(8): C23C14/02C23C14/04C23C14/16C23C14/06C23C14/35
CPCC23C14/022C23C14/044C23C14/0605C23C14/0635C23C14/165C23C14/352
Inventor 何东青尚伦霖李文生张广安成波张辛健
Owner LANZHOU UNIVERSITY OF TECHNOLOGY
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