Preparation method of epitaxial structure for medical sterilization and disinfection

Abstract

The invention provides a preparation method of an epitaxial structure for medical sterilization and disinfection. The method comprises steps of providing a substrate arranged on a tray; growing a first transition layer on the substrate; growing a first semiconductor layer on the first transition layer; growing a second transition layer on the first semiconductor layer; growing an active layer on the second transition layer; growing a second semiconductor layer on the active layer. The second transition layer comprises front barrier layers and front well layers which are alternately stacked, the aluminum content in the front barrier layers is gradually increased along with the thickness, the indium content in the front well layer is gradually reduced along with the thickness, and the tray rotation speed in the growth process of the first semiconductor layer is the same as the tray rotation speed in the growth process of the second transition layer. The method is advantaged in that the conversion time from the first semiconductor layer to the second transition layer can be reduced, and the cracking risk in the conversion process of different steps is reduced.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a method for preparing an epitaxial structure for medical sterilization and disinfection. Background technique [0002] The application of LED light source is not limited to general lighting. In the field of agriculture, LED lighting can be applied to vegetable production. After being illuminated by special LED lamps, the quality and output are greatly improved; in the field of automobiles, LED lights for vehicles have low energy consumption, high reliability, long life, and environmental protection. And it can improve safety at night, which is a new blue ocean in the LED lighting market; in terms of medical treatment, from outdoor to indoor, from special to general, the use of LED in the medical field continues to expand. According to the forecast of relevant research institutions, from 2010 to 2017, the application of LED in sterilization and disinfection is expected to...

AI Technical Summary

Problems solved by technology

[0005] Although ultraviolet LEDs have attracted the attention of the industry in recent years, their development has been slow, and they cannot be mass-produced and market-applied as quickly as visible LEDs. One reason is that they are affected by low mass production rates and high production costs. The current UV epitaxy technology is immature, the internal quantum efficiency is low, and the emitted light power is not high, which affects the application value of the product

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