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A kind of interdigitated large-area flexible array sensor and its preparation method

A flexible array and large-area technology, applied in the field of sensors, can solve the problems of difficult preparation, low efficiency, and high sensor sensitivity

Active Publication Date: 2021-07-06
SHAOXING UNIV YUANPEI COLLEGE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] The first purpose of the present invention is to overcome the low material utilization rate and high production cost in the prior art when the traditional photolithography process is used to prepare large-area flexible array sensors. When large-area integration, if the array density is high, the It will lead to the problems that the efficiency is too low and the preparation is too difficult. An interdigitated large-area flexible array sensor and its preparation method are provided, which are prepared by a full screen printing process. The process is simple, the efficiency is high, and the cost is low. And the prepared The large-area flexible array sensor has high sensitivity, good stability and large pressure sensing range
[0008] The second object of the present invention is to overcome the problem that the upper and lower plates of the sensors with the “sandwich” structure in the prior art must be precisely aligned during packaging, which requires high technology and reduces the packaging efficiency of the sensor. If there is no alignment, it will For the problem affecting the performance of the sensor, an interdigitated large-area flexible array sensor and its preparation method are provided. The interdigitated electrodes are used in the sensor, and the electrodes can be made on the same substrate material, which avoids the problem of precise alignment of the upper and lower electrode arrays. Process flow, improving assembly efficiency

Method used

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  • A kind of interdigitated large-area flexible array sensor and its preparation method
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  • A kind of interdigitated large-area flexible array sensor and its preparation method

Examples

Experimental program
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Effect test

Embodiment 1

[0050] Preparation of pole plate: Use 420-mesh steel screen to print Youtexin ID01 type conductive silver paste on PET substrate by screen printing process, form array electrodes and wires containing 25 array units on PET substrate, print Afterwards, place in a blast oven and dry at 120°C for 40 minutes to obtain an electrode plate;

[0051] Preparation of pressure-sensitive composite materials: 20g Ketjen black ECP600JD, 5g carbon nanotubes, 5g nano-SiO 2 And 10g 2% silane coupling agent Si-69, add in 85g naphtha, after stirring, ultrasonically disperse for 30min to form a dispersion liquid, add 350g room temperature vulcanized silicone rubber Dow Corning 184 to the dispersion liquid, and magnetically stir at room temperature for 3h to form a viscous Thick mixed solution, place the mixed solution in a vacuum drying oven at 40°C to dry for 20 minutes, remove air bubbles and incompletely volatilized naphtha, and obtain an uncured pressure-sensitive composite material;

[0052]...

Embodiment 2

[0055] Prepare the pole plate: use a 300-mesh polyester screen to print the Youtexin ID01 type conductive silver paste on the PET substrate through the screen printing process, and form an array electrode and wires containing 25 array units on the PET substrate. After printing, put it in a blast oven and dry it at 140°C for 60 minutes to make an electrode plate;

[0056] Preparation of pressure-sensitive composite materials: 75g Ketjen carbon black ECP600JD, 25g carbon nanotubes, 20g nano-SiO 2 And 40g of 2% silane coupling agent Si-69, add 25g of n-hexane, 65g of naphtha and 25g of absolute ethanol mixed solution, after stirring, ultrasonically disperse for 60min to form a dispersion, add 450g of room temperature vulcanized silicon to the dispersion Rubber Dow Corning 184, stirred magnetically at room temperature for 8 hours to form a viscous mixture, and dried the mixture in a vacuum drying oven at 100°C for 30 minutes to remove air bubbles and incompletely volatilized solve...

Embodiment 3

[0060] Prepare the pole plate: use a 400-mesh polyester screen to print Youtexin ID01 type conductive silver paste on the PET substrate through a screen printing process, and form an array electrode and wires containing 25 array units on the PET substrate. After printing, put it in a blast oven and dry it at 130°C for 50 minutes to make an electrode plate;

[0061] Preparation of pressure-sensitive composite materials: 50g Ketjen carbon black ECP600JD, 10g carbon nanotubes, 15g nano-SiO 2 And 30g of 2% silane coupling agent Si-69, add 70g of naphtha and 30g of absolute ethanol mixed solution, after stirring, ultrasonically disperse for 40min to form a dispersion, add 400g of room temperature vulcanized silicone rubber Dow Corning 184 to the dispersion, Stir magnetically at room temperature for 6 hours to form a viscous mixed solution, place the mixed solution in a vacuum drying oven at 70°C and dry for 25 minutes to remove air bubbles and incompletely volatilized naphtha and a...

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Abstract

The invention relates to the field of sensors, and discloses an interdigitated large-area flexible array sensor and a preparation method thereof. The sensor includes an electrode plate provided with an interdigitated array electrode and a wire, a flexible substrate, and an electrode plate and a flexible substrate between the electrode plate and the flexible substrate. The array pressure-sensitive layer and the insulating adhesive layer, the interdigital array electrodes include a number of array units containing the same interdigital electrodes, the wires include row wires and column wires, and the two ends of each interdigital electrode are respectively connected to the row wires and column wires, The preparation method comprises the following steps: preparing an electrode plate by a screen printing process; preparing a pressure-sensitive composite material; printing an uncured pressure-sensitive composite material on an array unit on the electrode plate by a screen printing process to form an array pressure-sensitive layer ; Bonding the electrode plate and the flexible substrate through insulating glue. The invention has simple process, high efficiency and low cost, and the prepared large-area high-density flexible array sensor has high sensitivity, good stability and large pressure sensing range.

Description

technical field [0001] The invention relates to the field of sensors, in particular to an interdigitated large-area flexible array sensor and a preparation method thereof. Background technique [0002] With the improvement of science and technology and modernization level, people have higher and higher requirements for pressure monitoring. It is no longer limited to pressure monitoring on regular rigid surfaces, and there are various forms. Ordinary rigid sensors can no longer meet people's actual needs. . Flexible pressure sensors can be bent or even folded at will, small in size, thin in thickness, flexible materials are basically non-toxic and harmless, and have good compatibility with the human body. A lot of research and application have been done. [0003] In recent years, with the rapid development of robotic bionic skin, flexible wearable devices and other fields, people's demand for large-area and high-density flexible sensor arrays has continued to increase. Sen...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L1/18G01L9/06B82Y15/00C09D183/04C09D5/24C09D7/61
CPCB82Y15/00C08K2201/001C09D5/24C09D183/04C09D7/61G01L1/18G01L9/06C08K5/54C08K3/36C08K3/04C08K3/041C08K13/02
Inventor 徐志望
Owner SHAOXING UNIV YUANPEI COLLEGE
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