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High-hardness material of high-entropy alloy nitride coating and preparation method of the high-hard material

A technology of high-entropy alloys and nitrides, applied in the field of materials science, can solve problems such as coating hardness and poor wear performance, and achieve the effects of low cost, simple production process, and low equipment requirements

Active Publication Date: 2019-02-15
XIAN TECH UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a high-hardness material of a high-entropy alloy nitride coating and a preparation method thereof, so as to solve the problems of poor hardness and wear performance of the existing one-, two-, or three-element nitride coatings

Method used

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Examples

Experimental program
Comparison scheme
Effect test

preparation example Construction

[0034] The instruments used in the preparation method of the present invention are: KQ2200DE type ultrasonic cleaning machine; WK-II type non-consumable vacuum arc melting furnace; wire cutting machine; MSP-400B type magnetron sputtering apparatus. The coating was prepared by MSP-400B magnetron sputtering apparatus and reactive sputtering method.

[0035] The test method adopted in the present invention: field emission electron microscope (SEM) to observe microscopic appearance; Energy Spectrometer (EDS) to analyze components; Nano-indentation instrument to measure nano-hardness and elastic modulus; Wear instrument to measure friction coefficient.

[0036] The invention discloses a high-hardness material of a high-entropy alloy nitride coating, which consists of a Cr transition layer on the surface of a substrate, a CrN transition layer on the surface of the Cr transition layer, and a nitride coating on the surface of the CrN transition layer. Layer composition; the nitride co...

Embodiment 1

[0045] Step 1: Target Preparation

[0046] Select aluminum, silicon, titanium, chromium, niobium and vanadium with a purity higher than 99.9%, that is, Al, Si, Ti, Cr, Nb, V bulk and granular metals, prepare raw materials in an atomic equimolar ratio, and carry out Ultrasonic cleaning of alcohol, acetone and alcohol, and finally put the raw materials into WK-Ⅱ non-consumable vacuum arc melting furnace to prepare high-entropy alloy ingots; put the melted high-entropy alloy ingots into wire electric discharge machine Cut to make a high-entropy alloy substrate with a diameter of 60 mm and a thickness of 5 mm, polish it, and repeat the above-mentioned ultrasonic cleaning process to finally obtain a high-entropy alloy target.

[0047] Step 2: Clean the high-entropy alloy target and the substrate to be processed

[0048] The mirror-polished high-entropy alloy target and the substrate to be treated were cleaned sequentially in absolute ethanol and acetone by ultrasonic cleaning for ...

Embodiment 2

[0058] Step 1: Target Preparation

[0059] Select aluminum, silicon, titanium, chromium, niobium and vanadium with a purity higher than 99.9%, that is, Al, Si, Ti, Cr, Nb, V bulk and granular metals, prepare raw materials in an atomic equimolar ratio, and carry out Ultrasonic cleaning of alcohol, acetone and alcohol, and finally put the raw materials into WK-Ⅱ non-consumable vacuum arc melting furnace to prepare high-entropy alloy ingots; put the melted high-entropy alloy ingots into wire electric discharge machine Cut to make a high-entropy alloy substrate with a diameter of 60 mm and a thickness of 5 mm, polish it, and repeat the above-mentioned ultrasonic cleaning process to finally obtain a high-entropy alloy target.

[0060] Step 2: Clean the high-entropy alloy target and the substrate to be processed

[0061] The mirror-polished high-entropy alloy target and the substrate to be treated were cleaned sequentially in absolute ethanol and acetone by ultrasonic cleaning for ...

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Abstract

The invention discloses a high-hardness material of a high-entropy alloy nitride coating and a preparation method of the high-hardness material. The high-hardness material is composed of a Cr transition layer located on the surface of a substrate, a CrN transition layer located on the surface of the Cr transition layer and a nitride coating located on the surface of the CrN transition layer; the nitride coating is obtained by using a radio frequency sputtering method through deposition of nitrogen and a high-entropy alloy, and the thickness of the Cr transition layer is 80-150 nm, the thickness of the CrN transition layer is 50-100 nm, and the thickness of the nitride coating is 1.5-2.5 [mu]m. The obtained high-hardness material of the high-entropy alloy nitride coating not only has a highhardness of more than 50 GPa, but also has good abrasion performance; and the coating has the characteristics of simple production technology, high deposition speed, low costs and the like, has the advantages of high efficiency, low energy consumption and low requirements for a device, and is suitable for being used a hard cutter coating.

Description

【Technical field】 [0001] The invention belongs to the field of materials science, and in particular relates to a high-hardness material of a high-entropy alloy nitride coating and a preparation method thereof. 【Background technique】 [0002] With the continuous development of advanced manufacturing industry, higher and higher requirements are put forward for the surface properties of materials, so that the surface of materials not only has high hardness and wear resistance, but also requires excellent high temperature resistance and corrosion resistance. . The commonly seen one-component, two-component or three-component nitride coatings can no longer meet the needs of many industries, which has to make people put forward higher performance requirements for protective coatings. In order to meet this demand, people try to add some new elements on the basis of existing nitride coatings to prepare multi-component nitride coatings. 【Content of invention】 [0003] The purpose...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/16C23C14/34C23C14/35
CPCC23C14/0036C23C14/0641C23C14/165C23C14/3414C23C14/3464C23C14/352
Inventor 陈建刘晓鹏杨巍苏霖深徐大鹏姚小飞吕煜坤
Owner XIAN TECH UNIV
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