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A kind of microlens array and its preparation method

A micro-lens array and hexagonal technology, applied in the field of micro-lens array, can solve the problems of easy wear, poor process uniformity, low efficiency, etc., and achieve the effects of feasible operation process, good optical performance, and reasonable theoretical basis.

Active Publication Date: 2020-05-22
CHINA BUILDING MATERIALS ACAD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the commonly used molding processes for microlens arrays mainly include diamond cutting, photoresist hot-melt molding, compression molding, inkjet printing technology and droplet method, photolithography ion exchange technology and gel method, etc., but the diamond cutting method Low efficiency and low processing precision; the lens made by photoresist hot-melt molding method is organic material, poor stability, and not resistant to high temperature; molding method, high cost, easy to wear, easy to damage the lens when demoulding; inkjet method is difficult to be accurate Control the surface shape of the lens, and its surface shape is similar to a spherical surface; photolithography ion exchange method, the process uniformity is poor

Method used

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  • A kind of microlens array and its preparation method
  • A kind of microlens array and its preparation method

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] Such as figure 1 As shown, this embodiment provides a method for manufacturing a microlens array, including the following steps:

[0033] (1) Use silicate glass to prepare cylindrical core material rods (ie, core glass rods below), with an outer diameter of 29mm and a length of 500mm; select borate glass to prepare cylindrical skin tubes (ie, skin glass tubes below) , The outer diameter is 36mm, the wall thickness is 3mm, and the length is 600mm.

[0034] (2) Combine the sheathed glass tube and the core glass rod into a preform, and use a drawing furnace to draw the preform into a cylindrical monofilament with an outer diameter of 0.6mm and a length of 600mm. The temperature of the drawing furnace is 800℃; The monofilaments are closely packed and arranged into hexagonal cylindrical multifilament rods with opposite sides of 30mm and 600mm long. The hexagonal cylindrical multifilament rods are drawn into hexagonal cylindrical multifilaments with opposite sides of 0.5mm through...

Embodiment 2

[0039] Such as figure 1 As shown, this embodiment provides a method for manufacturing a microlens array, including the following steps:

[0040] (1) Choose silicate glass to prepare a square cylindrical core material rod with 29mm opposite sides and 500mm long; choose borate glass to prepare a square cylindrical skin tube with 36mm opposite sides, 3mm wall thickness and 600mm long.

[0041] (2) Combine the skin glass tube and the core glass rod to form a preform, and use a wire drawing furnace to draw the preform into a square cylindrical monofilament with opposite sides 0.6 mm and a length of 600 mm. The temperature of the drawing furnace is 800 ℃; Stacked and arranged into square cylindrical multifilament rods with opposite sides of 30mm and length of 600mm, the multifilament rods are drawn into square cylindrical multifilaments with opposite sides of 0.5mm through a drawing furnace, and the temperature of the drawing furnace is 900℃; Closely packed and arranged into square cylin...

Embodiment 3

[0046] Such as figure 1 As shown, this embodiment provides a method for manufacturing a microlens array, including the following steps:

[0047] (1) Choose silicate glass to prepare a regular hexagonal cylindrical core material rod with 29mm opposite sides and 500mm long; choose borate glass to prepare a regular hexagonal cylindrical skin tube with 36mm opposite sides, 3mm wall thickness and 600mm long.

[0048] (2) Combine the skin glass tube and the core glass rod to form a preform, and use a wire drawing furnace to draw the preform into a hexagonal monofilament with opposite sides of 0.6 mm and a length of 600 mm. The temperature of the drawing furnace is 800 ℃; The hexagonal cylindrical monofilament is closely packed and arranged into a hexagonal cylindrical multifilament rod with the opposite side size of 30mm and a length of 600mm. The hexagonal cylindrical multifilament rod is drawn by a drawing furnace into a regular hexagonal cylindrical complex with opposite sides 0.5mm. ...

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Abstract

The invention relates to a preparation method of a micro-lens array. The preparation method comprises the following steps: preparing a blank plate: the blank is prepared into the blank plate with theperiodic composite structure through rod-pipe combination, wire drawing, plate arrangement and melt pressure; and ion beam etching: the surface of the blank plate is etched by ion beams. The inventionalso provides the micro-lens array prepared by the method. The photoresist is not used so as to avoid the process of photoetching and hot melting, and the obtained micro-lens array is made of glass material and has better optical performance and physicochemical stability.

Description

Technical field [0001] The invention relates to the technical field of microlens arrays, in particular to a microlens array and a preparation method thereof. Background technique [0002] Microlens arrays have become one of the most important optical components in micro-optical systems due to their small unit size, high integration, easy assembly and integration, etc., and has achieved success in optical connections, detector arrays, flat panel displays, and biomedical test chips. Widely used, it has become a research hotspot in the field of micro-optics and optical manufacturing. At present, the commonly used molding processes for microlens arrays mainly include diamond cutting, photoresist hot melt molding, compression molding, inkjet printing technology and droplet method, photolithography ion exchange technology and gel method, etc., but diamond cutting method Low efficiency and low processing accuracy; The photoresist hot-melt molding method makes the lens made of organic m...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B3/00C03B37/027
CPCC03B37/027G02B3/0012
Inventor 贾金升孙勇刘娟张洋侯伟杰张兵强
Owner CHINA BUILDING MATERIALS ACAD
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