Silicon nitride infusion filter membrane, preparation method thereof, filter and infusion device
A silicon nitride filter membrane, silicon nitride film technology, applied in chemical instruments and methods, filter accessories, membrane technology, etc., can solve the problems of complex routes, pressure loss, long filter paths, etc.
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Embodiment 1
[0049] like Figure 1~3 As shown, a silicon nitride material infusion filter membrane, it includes a body, the body has:
[0050] Monocrystalline silicon grid support body 86;
[0051] A silicon nitride filter membrane 87 arranged on the top surface of the single crystal silicon grid support body 86, the silicon nitride filter membrane 87 has a plurality of through filter holes, and the diameter of the filter holes is 0.2 micron to 1 micron , the depth of the filter holes is 0.1 micron to 0.5 micron, and the density of the filter holes on the surface of the silicon nitride filter membrane 87 can be 1 million to 600 million per square centimeter of surface area.
[0052]The grid side length or grid aperture of the single crystal silicon grid support body 86 is 0.05 mm to 2 mm; the total thickness of the body is 100 microns to 450 microns.
[0053] According to filtering needs, the pore size of silicon nitride filter membrane 87 can be set to 0.2 micron, will be blocked by sil...
Embodiment 2
[0069] like Figure 1~3 As shown, a filter that includes:
[0070] The silicon nitride material transfusion filter membrane 83 in embodiment one;
[0071] Housing 85, the silicon nitride material infusion filter membrane 83 is arranged in the housing 85, and the housing 85 is divided into a liquid inlet chamber and a liquid outlet chamber by the silicon nitride material infusion filter membrane 83; specifically , the surroundings of the precision infusion filter membrane 83 made of monocrystalline silicon are bonded and sealed with the casing 85, and the liquid inlet chamber and the liquid outlet chamber are completely isolated by the precision infusion filter membrane 83 made of monocrystalline silicon;
[0072] An infusion inlet 81, the infusion inlet 81 is connected to the housing 85, and the infusion inlet 81 communicates with the liquid inlet chamber;
[0073] A filtrate outlet 84, the filtrate outlet 84 is connected to the housing 85, and the filtrate outlet 81 communi...
Embodiment 3
[0076] like Figure 4 Shown, a kind of infusion set, it comprises:
[0077] The filter in embodiment two;
[0078] Conduit 5, one end of said conduit 5 communicates with the filtrate outlet 84 of filter 8;
[0079] A burette 4, one end of the burette 4 communicates with the other end of the conduit 5;
[0080] A puncture assembly, the puncture assembly is connected on the burette 4;
[0081] A speed regulator 7, said speed regulator 7 is arranged on the conduit 5.
[0082] like Figure 4 As shown, the infusion set also includes a three-way piece, the inlet of the three-way piece communicates with the filtrate outlet 84 of the filter 8, and one branch of the three-way piece communicates with one end of the conduit 5, and the three-way piece Another part of the part is the filling port 6.
[0083] like Figure 4 As shown, the burette 4 is provided with a drip pot 3, and the puncture assembly includes a piercer 2, and the piercer 2 communicates with the drip pot 3; the pie...
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