Diffraction grating etcher
A diffraction grating and etching machine technology, which is applied in the field of photolithography to ensure the quality and integrity and the sealing effect.
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[0026] In order to make the technical means, creative features, goals and effects achieved by the present invention easy to understand, the present invention will be further described below in conjunction with specific embodiments.
[0027] Such as Figure 1-4As shown, a diffraction grating etching machine according to the present invention includes a first fixed casing 1, a transmission mechanism 2, a second fixed casing 3, an etching mechanism 4, a feeding mechanism 5, a sealing mechanism 6, and an adjustment mechanism 7 and a photolithography mechanism 8, the first fixed housing 1 is provided with the photolithography mechanism 8; the first fixed housing 1 is provided with the feeding mechanism 5, and the feeding mechanism 5 includes the second A hydraulic cylinder 51 and a second bearing plate 52, the second hydraulic cylinder 51 is located at the bottom of the slide chamber of the first fixed housing 1, and the top of the second hydraulic cylinder 51 is connected to the s...
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