X-ray fluorescence (xrf) spectroscopy systems and methods

Abstract

The present application provides an X-ray fluorescence (XRF) spectroscopic analysis system and method, the system includes at least one X-ray light source (1), at least one detector (4) and at least one diffractive optical component (3), the diffractive The optical component collects primary X-rays emitted by the X-ray light source, and the primary X-rays are diffracted by the diffractive optical component to obtain single-wavelength X-rays, and the single-wavelength X-rays are used to excite the measured sample (5) The detected element in the detector emits fluorescent X-rays, and the detector collects and analyzes the fluorescent X-rays; the light collected by the detector also includes scattered rays generated by the scattering of single-wavelength X-rays by the measured sample; The primary X-ray, the single-wavelength X-ray and the fluorescent X-ray constitute a single-wavelength polarization extinction optical path to make the scattered line polarization extinction to reduce or eliminate the single-wavelength X-ray scattering in the sample to be measured. background strength.

Description

technical field [0001] The present application relates to the field of X-ray detection, in particular to an X-ray fluorescence (XRF) spectroscopic analysis system and method. Background technique [0002] As a qualitative and quantitative analysis technology for elemental components, X-ray fluorescence spectrometer has distinctive features such as simple structure, fast analysis, simple sample preparation, non-destructive, and multi-element simultaneous analysis, and has been widely used in many industries. [0003] X-rays are electromagnetic radiation with a short wavelength, usually referring to photons with energy ranging from 0.1 to 100 keV. When the energy of high-energy photons or particles is higher than the binding energy of the inner layer electrons of the tested sample atoms, an inner layer electron of the atom can be expelled and a hole will appear in it, making the entire atomic system in an unstable excited state, and the outer layer electrons will be A spontan...

AI Technical Summary

Problems solved by technology

However, the traditional energy dispersive system still has certain limitations, such as the detection limit is not low enough, the detection sensitivity is insufficient, and it is not suitable for the analysis of light elements, etc., thus limiting its application in the detection of trace elements

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