Preparing method for Cu2Se compound rotation target material
A technology of rotating targets and compounds, which is applied in metal material coating technology, ion implantation plating, pressure inorganic powder plating, etc., can solve the problems of high cost, uneven density, and material utilization rate not exceeding 40%, and achieve Low production cost, uniform internal density and high production efficiency
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preparation example Construction
[0021] Cu 2 The preparation method of Se compound rotating target material specifically comprises the following steps:
[0022] Step 1: Prepare non-magnetic metal pipe fittings as the substrate, and select Cu with an average particle size of 1-5 μm 2 Se powder;
[0023] Non-magnetic metal pipe fittings are selected from non-magnetic stainless steel tubes, metal copper tubes, metal titanium tubes, nickel-chromium tubes or nickel-aluminum tubes. The surface is pretreated by sandblasting, cleaning, drying, etc.; Cu 2 The purity of the Se powder is 99.9%-99.999%, the total impurity content is less than 1000ppm, the single impurity element is less than 500ppm, and the powder below 1μm is screened out.
[0024] Step 2: Use supersonic cold spraying technology to spray Cu on the outer surface of the pretreated substrate 2 For Se powder, the thickness of the deposited layer does not exceed 20mm; use cold isostatic pressing technology for high-pressure treatment to further increase ...
Embodiment 1
[0031] a Cu 2 The preparation method of Se compound rotating target material specifically comprises the following steps:
[0032] (1) Prepare non-magnetic stainless steel pipes, the size of which is processed to meet the requirements of use, and the two ends are processed into screw buckles for connection as required, and the surface is pretreated by sandblasting, cleaning, drying, etc.; the purchase purity is 99.9% to 99.999% Cu 2 Se powder, and sieve out the powder below 1μm;
[0033] (2) Under the nitrogen protection atmosphere, the powder feeding device will Cu 2 The Se powder is sent to the supersonic cold spraying technology gun. When the non-magnetic stainless steel tube keeps rotating, the high-speed airflow will transfer the Cu 2 Se powder is sprayed layer by layer on the surface of the substrate in a scanning manner, each layer is 2 μm, until Cu 2 The accumulation of the Se layer reaches 7mm, and it is cooled to room temperature. Among them, the gas pressure at t...
Embodiment 2
[0038] a Cu 2 The preparation method of Se compound rotating target material specifically comprises the following steps:
[0039] (1) Prepare metal copper pipes, the size of which is processed to meet the requirements for use, and the two ends are processed into screw buckles for connection as required, and the surface is pretreated by sandblasting, cleaning, drying, etc.; purchase purity of 99.9% to 99.999% Cu 2 Se powder, and sieve out the powder below 1μm;
[0040] (2) Under the helium protective atmosphere, the powder feeding device will Cu 2 The Se powder is sent to the supersonic cold spraying technology gun. When the metal copper tube keeps rotating, the high-speed airflow will 2 Se powder is sprayed layer by layer on the surface of the substrate in a scanning manner, each layer is 4 μm, until Cu 2 The accumulation of the Se layer reaches 11mm, and it is cooled to room temperature. Among them, the gas pressure at the inlet of the cold spraying is 3MPa, and the gas t...
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