Manufacturing method of large-scale high-purity molybdenum alloy rotating target material

A manufacturing method, molybdenum alloy technology, applied in metal material coating process, ion implantation plating, coating, etc., can solve the problems of large-scale rotating target composite toughening and purity can not be achieved at the same time, to improve the structure Effect of uniformity, grain refinement, and elimination of uneven structure

Active Publication Date: 2017-04-19
LUOYANG KEWEI MOLYBDENUM & TUNGSTEN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In order to solve the problem that the compound toughness and purity of the large-scale rotating target cannot be achieved at the same time in the prior art, the present invention provides a method for manufacturing a large-scale high-purity molybdenum alloy rotating target

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0020] A method for manufacturing a large-scale high-purity molybdenum alloy rotating target, comprising the following steps:

[0021] Step 1. Select ammonium molybdate and roast at 550° C. for 3 hours to obtain molybdenum trioxide powder for later use;

[0022] Step 2. Weigh hafnium powder whose mass is 0.28% of molybdenum trioxide powder mass, mix hafnium powder and molybdenum trioxide powder and place in a crucible, preheat at 600°C for 5min under hydrogen atmosphere, and then raise the temperature to 1150°C ℃, keep warm for 7 hours, cool for 1 hour under the condition that the hydrogen dew point is -25 ℃, reach room temperature, put the mixed powder in a ball mill and ball mill to 400 mesh, and set aside;

[0023] Step 3. Put the mixed powder in the crucible of a rotary hearth furnace with a vacuum degree of 0.001 Pa and a temperature of 2260°C. After melting until it is completely melted, add potassium aluminum silicate particles whose mass is 0.002% of the total mass of ...

Embodiment 2

[0026] A method for manufacturing a large-scale high-purity molybdenum alloy rotating target, comprising the following steps:

[0027] Step 1. Select ammonium molybdate and roast at 650° C. for 0.5 h to obtain molybdenum trioxide powder for later use;

[0028] Step 2. Weigh hafnium powder whose mass is 0.3% of molybdenum trioxide powder, mix hafnium powder and molybdenum trioxide powder and place in a crucible, preheat at 550°C for 10min under hydrogen atmosphere, and then raise the temperature to 1050°C ℃, after 8.5 hours of heat preservation, cool to room temperature under the condition of hydrogen dew point of -25 ℃, put the mixed powder in a ball mill and ball mill to 400 mesh, and set aside;

[0029] Step 3. Put the mixed powder in the crucible of a rotary hearth furnace with a vacuum degree of 0.001 Pa and a temperature of 2200°C. After melting until it is completely melted, add potassium aluminum silicate particles whose mass is 0.002% of the total mass of the mixed pow...

Embodiment 3

[0032]A method for manufacturing a large-scale high-purity molybdenum alloy rotating target, comprising the following steps:

[0033] Step 1. Select ammonium molybdate and roast at 450° C. for 2.5 hours to obtain molybdenum trioxide powder for later use;

[0034] Step 2. Weigh hafnium powder whose mass is 0.25% of the mass of molybdenum trioxide powder, mix the hafnium powder and molybdenum trioxide powder and place it in a crucible. ℃, keep warm for 9 hours, then cool to room temperature, put the mixed powder in a ball mill and mill to 400 mesh, and set aside;

[0035] Step 3: Put the mixed powder in the crucible of a rotary hearth furnace with a vacuum degree of 0.001Pa and a temperature of 2160°C, melt until it is completely melted, add potassium aluminum silicate particles whose mass is 0.002% of the total mass of the mixed powder, and heat up to Continue smelting at 2500°C for 3 minutes, pour into a tube billet, cool down to room temperature at a rate of 47°C / s, and then...

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Abstract

The invention discloses a manufacturing method of a large-scale high-purity molybdenum alloy rotating target material. The manufacturing method comprises the following steps of: preparing molybdenum trioxide powder; pouring a tube blank by utilizing the molybdenum trioxide powder and hafnium, and carrying out isostatic cool pressing on the tube blank; and carrying out sintering, extrusion and machining. According to the manufacturing method, a trace of hafnium powder is added in molybdenum trioxide to play a role of refining the particles, so that small-particle size molybdenum powder can be obtained and the density and breaking tenacity of the sintered blank can be improved; and the density of the prepared rotating target material is greater than 10.18g / cm3 and the purity is greater than 99.9%.

Description

technical field [0001] The invention relates to the technical field of rotating targets, in particular to a method for manufacturing a large-scale high-purity molybdenum alloy rotating target. Background technique [0002] Rotary sputtering molybdenum and molybdenum alloy targets are mainly used in the photovoltaic solar energy industry, and other sputtering fields are also transformed from planar targets to rotating molybdenum and molybdenum alloy targets. With the continuous advancement of technology, the raw material requirements of the solar energy industry and other industries have been continuously improved, and it has developed from G3.5 generation to G8.5 generation and above. The outer diameter is 125mm and 135mm, and the rotating molybdenum and molybdenum alloy targets above the G8.5 generation line are the core parts of sputtering molybdenum and molybdenum alloy thin films. With the advancement of technology, sputtering target manufacturers also use rotating targe...

Claims

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Application Information

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IPC IPC(8): C23C14/34C22C1/02C22C27/04B22F9/22C22F1/18
CPCB22F9/22C22C1/02C22C27/04C22F1/18C23C14/3414
Inventor 张灵杰
Owner LUOYANG KEWEI MOLYBDENUM & TUNGSTEN
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