Chemical mechanical polishing liquid and preparation method thereof

Abstract

The invention discloses a chemical mechanical polishing liquid and a preparation method thereof. The chemical mechanical polishing liquid is prepared from, by weight, 15-30 parts of phosphoric acid, 10-20 parts of sodium tetraborate, 10-20 parts of sodium silicate, 10-20 parts of sodium bicarbonate, 10-20 parts of sodium citrate, 25-45 parts of deionized water, 10-15 parts of talcum powder, 8-10 parts of calcium carbonate, 1-10 parts of oxidizing agent, 5-10 parts of liquid paraffin, 2-10 parts of corrosion inhibitor, 1-10 parts of surfactant, 1-9 parts of pH regulator, 1-3 parts of kaolin, 1-2 parts of diatomite, 1-2 parts of lamellar mica powder and 1-2 parts of hollow glass beads. The raw materials are stirred, heated and mixed to obtain the chemical mechanical polishing liquid. The chemical mechanical polishing liquid is effective in polishing, harmless to surfaces of semiconductor chips, safe, nontoxic, free of harmful gases and capable of increasing polishing speed and reducing surface contaminants of polishes materials.

Description

technical field [0001] The invention relates to the field of semiconductor surface treatment, in particular to a chemical mechanical polishing liquid and a preparation method thereof. Background technique [0002] Chemical mechanical polishing technology is one of the key technologies for surface processing of semiconductor wafers, and it is used to planarize the surface at each stage of the integrated circuit manufacturing process, and the polishing liquid has an important impact on the polishing efficiency and processing quality, but due to high technical requirements , the current commercialized polishing fluid formula is in a state of complete secrecy, mainly concentrated in the United States, Japan, and South Korea. This has also led to the fact that most of the polishing fluid used in the processing of semiconductor silicon polishing wafers in my country must be imported. Although my country currently has dozens of enterprises in the polishing liquid industry, there a...

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Problems solved by technology

Although my country currently has dozens of companies in the polishing fluid industry, few companies are really involved in the manufacturing and research and development of semiconductor silicon wafer polishing fluids.