Nanowire intermediate band solar cell structure based on butterfly-shaped plasmon antenna enhancement
A technology of solar cells and plasmons, applied in the field of solar cells, can solve the problems of low absorption efficiency and low density of solar cells in the middle band, etc., and achieve enhanced light absorption efficiency, improved photoelectric conversion efficiency, and improved absorption and overall photoelectric conversion. The effect of efficiency
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[0025] The present invention proposes a nanowire mid-band solar cell structure based on a butterfly plasmon enhanced antenna. The present invention is further described below through specific process steps and accompanying drawings:
[0026] (1) Oxygen-doped ZnTe / ZnO core-shell nanowire structure is prepared by physical vapor deposition method, and transferred by mechanical method to make it lie flat on a silicon dioxide or quartz substrate. The nanowire length of p-type oxygen-doped zinc telluride / n-type zinc oxide core-shell structure is 1-10um, the diameter of zinc telluride nanowire is 200-400nm, and the oxygen diffusion doping concentration in zinc telluride is 1-5 %, the thickness of zinc oxide is 5-40nm;
[0027] (2) Spin-coat photoresist on the substrate surface containing nanowires, the photoresist adopts positive resist;
[0028] (3) Utilize electron beam exposure and development to form a pattern of symmetrical tip-to-tip triangular pyramid periodic arrays on both ...
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