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Polymer micro-fluidic chip and preparation method thereof

A microfluidic chip, polymer technology, applied in microstructure technology, microstructure devices, manufacturing microstructure devices, etc., can solve the problem of difficult to control the uniformity and continuity of the metal layer, affect the device effect, and difficult to realize microfluidic control. Accurate detection and other problems, to achieve the effect of large market application potential, easy mass production, and efficient preparation

Inactive Publication Date: 2016-05-04
SUZHOU FUYI ELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, under this structure, when depositing electrode metal on the sidewall, it is difficult to control the uniformity and continuity of the metal layer, which will cause the disconnection of the electrode and affect the device effect.
For another example, although CN103822961A discloses the use of micro-nano processing technology to prepare an electrochemical microfluidic chip, it is basically a typical detection electrode prepared by using micro-nano processing, and it is also a DC channel prepared by traditional injection molding, so it is difficult to realize microfluidic control. accurate detection of

Method used

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  • Polymer micro-fluidic chip and preparation method thereof
  • Polymer micro-fluidic chip and preparation method thereof
  • Polymer micro-fluidic chip and preparation method thereof

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[0024] One aspect of the embodiments of the present invention provides a method for preparing a polymer microfluidic chip, which includes: using UV-LIGA technology to prepare a microfluidic channel mold, and then performing micro-injection molding or spin coating and peeling. The preparation of the microfluidic channel forms the microfluidic matrix, and finally connects the microfluidic matrix with the electrode matrix with electrodes by means of bonding or hot pressing to form a microfluidic detection chip.

[0025] In some embodiments, the preparation method of the polymer microfluidic chip may include:

[0026] providing a first polymer substrate comprising an electrode protruding from a first surface of the first polymer substrate;

[0027] Using UV-LIGA technology to prepare a micro-channel mold, and then using the micro-channel mold to prepare a second polymer matrix containing micro-channels by micro-injection molding, the micro-channels are recessed in the first a sec...

Embodiment 1

[0061] The microfluidic chip preparation process of embodiment 1 PDMS (polydimethylsiloxane) material comprises the following steps:

[0062] 1) Mix the PDMS material evenly, fully stir it with a mechanical stirrer, and then use a vacuum oven to pump air;

[0063] 2) On the glass substrate, spin-coat the treated PDMS material with a spin-coating device;

[0064] 3) Curing the PDMS spin-coated on the glass substrate at 80-200°C;

[0065] 4) Then sputtering a metal Ti layer 1 with a thickness of 20-50 nm on the substrate as a connecting layer;

[0066] 5) On the sputtered metal Ti layer, a layer of 100-200nm metal Au is sputtered;

[0067] 6) On the Au layer, throw a layer of glue with a thickness of about 2um, and perform pre-baking;

[0068] 7) Expose and develop the photoresist on the gold layer to pattern the Au test electrode

[0069] 8) Carry out glue rejection and photolithography to expose the counter electrode area;

[0070] 9) Sputtering 100-200nm metal Pt to achi...

Embodiment 2

[0084] The microfluidic chip preparation process of embodiment 2PMMA (polymethyl methacrylate) material comprises the following steps:

[0085] 1) Use high-transparency PMMA as the substrate, wash with acetone, ethanol, and deionized water, then blow dry with nitrogen, and place in an ultra-clean environment;

[0086] 2) Then sputter a metal Ti layer with a thickness of about 20-50 nm on the substrate as a connection layer;

[0087] 3) On the sputtered metal Ti layer, a metal Au film with a thickness of about 100-200 nm is sputtered;

[0088] 4) On the sputtered Au film, use the process steps of spin coating, exposure, and development to pattern the gold electrode;

[0089] 5) Then utilize the wet etching solution to etch out the gold electrode pattern;

[0090] 6) Utilize wet etching solution to etch excess titanium metal patterns;

[0091] 7) Carry out glue rejection and photolithography to expose the counter electrode area;

[0092] 8) Sputter metal Pt with a thickness ...

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Abstract

The invention discloses a polymer micro-fluidic chip and a preparation method thereof. The preparation method comprises the following steps: providing a first polymer substrate, wherein an electrode is arranged on a first surface of the first polymer substrate in a raised form; adopting a UV-LIGA technique for preparing and forming a micro-channel mould, and then utilizing the micro-channel mould to prepare a second polymer substrate including a micro-channel by a micro-injection mode, wherein the micro-channel is concaved on a second surface of the second polymer substrate; and sealing the first and second surfaces, causing the electrode to be at least locally exposed in the micro-channel and realizing the packaging of the polymer micro-fluidic chip. According to the invention, the UV-LIGA technique is adopted for preparing the micro-fluidic detection chip based on the polymer substrate; the high-efficient preparation for the high-precision high aspect ratio micro-fluidic chip structure can be realized; the technique is simple and the cost is low; the polymer micro-fluidic chip can be easily produced in batches and has a huge market application potential; and the acquired polymer micro-fluidic chip is used for detecting the trace matters, such as, detecting the trace heavy metal ions, antigens and antibody organisms in water.

Description

technical field [0001] The invention relates to a microfluidic chip and a preparation process thereof, in particular to a polymer microfluidic chip suitable for detecting trace substances and a preparation method thereof, belonging to the technical field of micro-nano processing. Background technique [0002] With the rapid development of social industrial society, more and more micro-devices, especially micro-electromechanical systems (Microelectromechanical Systems, MEMS) have been widely used in various fields. [0003] One of the important micro-devices, the microfluidic chip, has attracted extensive attention from experts at home and abroad because of its unique performance. Microfluidic chips are based on the basic principles and technologies of ordinary capillary electrophoresis, and use micro-nano processing technology to process various microstructures on silicon, quartz, glass or polymer matrix materials, such as pipes, reaction pools, Functional units such as ele...

Claims

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Application Information

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IPC IPC(8): G01N27/30G01N27/447B81B3/00B81C1/00
CPCG01N27/30B81B3/0032B81C1/00134G01N27/447
Inventor 刘瑞邓敏李晓波张方兴
Owner SUZHOU FUYI ELECTRONICS TECH CO LTD
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