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Electrolyte for in-situ growth of barium strontium titanium ferroelectric film on surface of titanium substrate and preparing method of film

A technology of barium strontium titanate and ferroelectric thin film, which is applied in the field of functional thin film materials, can solve the problems of affecting thin film performance, loose film surface, large roughness value, etc., and achieve fast film forming speed, high bonding strength and simple process Effect

Inactive Publication Date: 2016-01-13
GUANGDONG POLYTECHNIC NORMAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since MAO film formation must rely on arc discharge, which leads to local high temperature, resulting in loose, uneven and large roughness on the surface of the film, this defect seriously affects the performance of the film

Method used

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  • Electrolyte for in-situ growth of barium strontium titanium ferroelectric film on surface of titanium substrate and preparing method of film
  • Electrolyte for in-situ growth of barium strontium titanium ferroelectric film on surface of titanium substrate and preparing method of film
  • Electrolyte for in-situ growth of barium strontium titanium ferroelectric film on surface of titanium substrate and preparing method of film

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0044] In-situ growth of barium strontium titanate ferroelectric thin film on commercially pure titanium TA2 specifically includes the following steps:

[0045] (1) Sample preparation: Cut the Ti plate into a substrate of 40*20*2mm, and grind the Ti substrate step by step with 180# to 1000# sandpaper until the surface is bright and smooth.

[0046] (2) Pre-treatment of the sample: Wash the polished Ti sheet in acetone and deionized water respectively, and dry it for later use.

[0047] (3) Electrolyte preparation: 0.5mol / LBa(OH) 2 , 0.5mol / LSr(OH) 2 and 0.03mol / LEDTA as the solute, and deionized water as the solvent to prepare 1L of electrolyte. The prepared electrolyte was stirred on a magnetic heating stirrer for 30 minutes, the heating temperature was set at 60° C., and the rotation speed was 1500 r / min.

[0048] (4) Ferroelectric thin film preparation: connect the titanium sheet pretreated in steps (1) and (2) to the anode, and place it in the electrolyte solution in st...

Embodiment 2

[0051] In this embodiment, except for the composition of the electrolyte and the reaction time, other features are the same as in Embodiment 1.

[0052] The electrolyte composition is as follows: with 0.5mol / LBa(OH) 2 , 0.5mol / LSr(OH) 2 and 0.05mol / LEDTA as the solute, and deionized water as the solvent to prepare 1L of electrolyte.

[0053] The reaction time of this embodiment is 15min.

[0054] The phase composition and surface morphology of the obtained film are similar to those in Example 1, and the surface roughness of the film is about 0.408um. The hysteresis loop of the thin film measured by the RADIANT Precision Premier II system is as follows: image 3 As shown in (c), under the condition of 700V applied electric field and 20Hz frequency, the remnant polarization is about 12μC / cm 2 . The dielectric constant of the film is 455.3 and the dielectric loss is 0.167 under the condition of 1KHz measured by AGILENT4284APrecisionLCRMETER system (test signal is 0.1V).

Embodiment 3

[0056] In this embodiment, except for the composition of the electrolyte and the reaction time, other features are the same as in Embodiment 1.

[0057] The electrolyte composition is as follows: with 0.5mol / LBa(OH) 2 , 0.5mol / LSr(OH) 2 and 0.06mol / LEDTA as the solute, and deionized water as the solvent to prepare 1L of electrolyte.

[0058] The reaction time of this embodiment is 15min.

[0059] The phase composition and surface morphology of the obtained thin film are similar to those in Example 1, and the surface roughness of the thin film is about 0.422um. The hysteresis loop of the thin film measured by the RADIANT Precision Premier II system is as follows: image 3 As shown in (d), under the conditions of 1400V applied electric field and 20Hz frequency, the remnant polarization is about 10μC / cm 2 . The dielectric constant of the film is 387.2 and the dielectric loss is 0.456 under the condition of 1KHz measured by AGILENT4284APrecisionLCRMETER system (test signal is...

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Abstract

The invention discloses an electrolyte for in-situ growth of a barium strontium titanium ferroelectric film on the surface of a titanium substrate and a preparing method of the film. The electrolyte is prepared from barium hydroxide with the concentration of 0.2 mol / L-0.8 mol / L or barium hydroxide with the concentration of 0.2 mol / L-0.8 mol / L, strontium hydroxide with the concentration of 0.2 mol / L-0.8 mol / L or strontium hydroxide octahydrate the concentration of 0.2 mol / L-0.8 mol / L, and an additive, namely ethylene diamine tetraacetic acid (EDTA) with the concentration of 0.01 mol / L-0.1 mol / L. According to the electrolyte, the components are simple, the stability is good, and the requirement for environment protection is met. The film preparing technique is simple and can be implemented at normal temperature, film forming speed is high, and the smooth and compact barium strontium titanium ferroelectric film having a good ferroelectric property can be obtained without post heat treatment.

Description

technical field [0001] The invention belongs to the field of functional thin film materials, and specifically relates to an electrolyte and a preparation method for in-situ growth of strontium barium titanate ferroelectric thin film on the surface of a titanium substrate, which can prepare smooth, dense and good ferroelectric properties at room temperature. The ferroelectric thin film does not require subsequent heat treatment, is environmentally friendly, and has good industrial application prospects. Background technique [0002] Ferroelectric thin film materials are widely used as DRAM, microwave and piezoelectric devices, pyroelectric detectors, ferroelectric Application research on key materials of photovoltaic cells and other components. ABOs 3 type composite perovskite ferroelectric material Ba x Sr 1-x TiO 3 (BST) is BaTiO 3 (BT) and SrTiO 3 The infinite solid solution of (ST) has become one of the hot spots in the research of new functional materials at home ...

Claims

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Application Information

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IPC IPC(8): C25D11/26
Inventor 王敏李文芳王晓军
Owner GUANGDONG POLYTECHNIC NORMAL UNIV
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