Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Large-size integral aluminum-neodymium rotary target material and preparation method thereof

A rotating target, large-scale technology, applied in metal material coating process, ion implantation coating, pressure inorganic powder coating, etc., can solve the problems of sputtering equipment failure, expensive binding equipment, target desoldering and other problems , to achieve the effect of good product quality, improved coating efficiency and low porosity

Active Publication Date: 2015-08-12
赣州优膜科技有限公司
View PDF6 Cites 17 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the existing methods all require a subsequent target binding process, that is, the target and the back plate (usually a metal copper plate) are bound together by brazing. The binding technology itself is a complicated process, and the binding equipment is expensive; At the same time, once the binding effect is poor, the target will heat up rapidly, causing problems such as target desoldering, target melting, and equipment overheating. In severe cases, the sputtering equipment will fail or be scrapped

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] Preparation of an integrated large-size aluminum neodymium rotating target,

[0025] (1) Choose 304 stainless steel as the substrate tube, remove the oxide layer on the surface of the substrate by mechanical grinding, remove the dirt on the surface of the substrate by ultrasonic cleaning, and then perform sandblasting on the surface of the substrate to make the surface of the substrate reach a suitable roughness , in order to facilitate the combination of the coating and the substrate, the sandblasting treatment uses steel grit with a particle size of 16-30 mesh.

[0026] (2) Nickel-clad aluminum alloy wire is sprayed with electric arc, and the thickness of the primer layer is 0.15mm.

[0027] (3) Select aluminum neodymium powder with a purity of not less than 99.99% and a particle size of 20-100 μm, and ball mill for 3 hours to shape.

[0028] (4) Use 3 sets of vacuum units to extract vacuum from the vacuum cold spray tank, and use a vacuum detector to detect the vacu...

Embodiment 2

[0033] Preparation of an integrated large-size aluminum neodymium rotating target,

[0034] (1) Choose 304 stainless steel as the substrate tube, remove the oxide layer on the surface of the substrate by mechanical grinding, remove the dirt on the surface of the substrate by ultrasonic cleaning, and then perform sandblasting on the surface of the substrate to make the surface of the substrate reach a suitable roughness , in order to facilitate the combination of the coating and the substrate, the sandblasting treatment uses steel grit with a particle size of 24 mesh.

[0035] (2) Nickel-clad aluminum alloy wire is sprayed with electric arc, and the thickness of the primer layer is 0.2mm;

[0036] (3) Select aluminum neodymium powder with a purity not lower than 99.99% and a particle size of 20-100 μm.

[0037] (4) Vacuum the vacuum cold spray tank body with a vacuum unit, and fill the inside of the spray tank body with argon gas through the inlet valve as a protective gas.

...

Embodiment 3

[0041] Preparation of an integrated large-size aluminum neodymium rotating target,

[0042] On the 304 stainless steel back tube with a length of 300mm and an outer diameter of 133mm, an aluminum neodymium rotating target with a thickness of 9mm is vacuum cold sprayed.

[0043] (1) Choose 304 stainless steel as the substrate tube, remove the oxide layer on the surface of the substrate by mechanical grinding, remove the dirt on the surface of the substrate by ultrasonic cleaning, and then perform sandblasting on the surface of the substrate to make the surface of the substrate reach a suitable roughness , in order to facilitate the combination of the coating and the substrate, the sandblasting treatment uses steel grit with a particle size of 24 mesh.

[0044] (2) Nickel-clad aluminum alloy wire is sprayed with electric arc, and the thickness of the primer layer is 0.2mm;

[0045] (3) Select aluminum neodymium powder with a purity not lower than 99.99% and a particle size of 2...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
thicknessaaaaaaaaaa
oxygen contentaaaaaaaaaa
particle sizeaaaaaaaaaa
Login to View More

Abstract

The invention discloses a large-size integral aluminum-neodymium rotary target material and a preparation method thereof. The preparation method comprises pretreatment and electric arc spraying priming on a stainless steel base back tube, carrying out ball milling shaping on aluminum-neodymium powder with purity of 99.99%, carrying out aluminum-neodymium powder plasma cold spraying on the stainless steel base back tube with a nickel-aluminum transition layer in vacuum or protective atmosphere so that the aluminum-neodymium rotary target material is formed. The aluminum-neodymium rotary target material has thickness of 3-16mm, target material relative density greater than 97%, purity of 99.99% and oxygen content less than 200ppm. The preparation method has the advantages of high vacuum spraying purity, low oxygen content, high cold spraying density and uniform microstructure and greatly improves target material quality. The prepared target material can be used in wide fields.

Description

technical field [0001] The invention belongs to the field of target material preparation, and in particular relates to the preparation of a large-scale integrated aluminum-neodymium rotating target material. Background technique [0002] The aluminum neodymium target is mainly used for the coating of the electrode layer of the glass substrate of the flat panel display and touch screen. At present, small-size planar targets are mainly developed and produced by vacuum melting and hot-pressing sintering methods, and large-size targets are formed by small-size splicing. Because it is not integrated (splicing is required), it is easy to generate arc discharge, so the quality of film formation is poor, and it is difficult to really apply it to high-quality display screens and touch screens. Although, people have used vacuum melting to produce hollow aluminum neodymium target tubes, and bonded to stainless steel back tubes by indium welding to produce aluminum neodymium rotating t...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/34C23C24/04
Inventor 徐从康
Owner 赣州优膜科技有限公司
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com