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Chromium-aluminum alloy target and manufacturing method thereof

A technology of chrome-aluminum alloy and target material, which is applied in the field of target material manufacturing, can solve the problem that the coating material is difficult to meet, and achieve the effect of controlling the oxygen content

Active Publication Date: 2015-03-25
SHANDONG HAO XUAN ELECTRONICS CERAMIC MATERIALS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Obviously, a single coating material is difficult to meet the above requirements

Method used

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  • Chromium-aluminum alloy target and manufacturing method thereof
  • Chromium-aluminum alloy target and manufacturing method thereof
  • Chromium-aluminum alloy target and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] (1) select the raw material that oxygen content is all lower than 2000ppm, purity is greater than 99.9%, particle size is-100 order, carry out mixing according to proportion, Cr is 22at%, Al is 63at%, Ti is 12at%, W is 2at%, Y is 1at%;

[0037] (2) Put the mixed material into the ladle, and the argon arc welding will not leak;

[0038] (3) The ladle sleeve is placed in a well-type heat treatment furnace for degassing treatment, the degassing treatment temperature is 220 ° C, and the degassing treatment time is 8 hours;

[0039] (4) weld the ladle cover that has been degassed;

[0040] (5) Put the degassed ladle sleeve in the hot isostatic pressing equipment for hot isostatic pressing treatment. The hot isostatic pressing treatment conditions are a temperature of 550 ° C, a heating rate of 60 ° C / hour, and a temperature homogenization time of 2 hours, the holding time is 3 hours, and the cooling rate is 75°C / hour.

[0041] (6) Take it out when the temperature drops ...

Embodiment 2

[0045] (1) select the raw material that oxygen content is all lower than 2000ppm, and purity is greater than 99.9%, and particle size is-200 order, carries out mixing according to proportion, and Cr is 20at%, Al is 65at%, Si is 13at%, V is 1at%, Ce is 1at%;

[0046] (2) Put the mixed material into the ladle, and the argon arc welding will not leak;

[0047] (3) The ladle sleeve is placed in a well-type heat treatment furnace for degassing treatment, the degassing treatment temperature is 300 ° C, and the degassing treatment time is 4 hours;

[0048] (4) weld the ladle cover that has been degassed;

[0049] (5) Put the degassed ladle sleeve in the hot isostatic pressing equipment for hot isostatic pressing treatment. The hot isostatic pressing treatment conditions are a temperature of 520 ° C, a heating rate of 80 ° C / hour, and a temperature homogenization time of 1 hours, the holding time is 4 hours, and the cooling rate is 50°C / hour.

[0050] (6) Take it out when the tempe...

Embodiment 3

[0054] (1) select the raw material whose oxygen content is all lower than 2000ppm, the purity is greater than 99.9%, the particle size is -400 mesh, mix according to the proportion, Cr is 30at%, Al is 64at%, W is 2at%, B is 3at%, La is 1 at %;

[0055] (2) Put the mixed material into the ladle, and the argon arc welding will not leak;

[0056] (3) The ladle sleeve is placed in a well-type heat treatment furnace for degassing treatment, the degassing treatment temperature is 299 ° C, and the degassing treatment time is 12 hours;

[0057] (4) weld the ladle cover that has been degassed;

[0058] (5) Put the degassed steel ladle in the hot isostatic pressing equipment for hot isostatic pressing treatment. The hot isostatic pressing treatment conditions are a temperature of 540 ° C, a heating rate of 80 ° C / hour, and a temperature homogenization time of 1 hours, the holding time is 5 hours, and the cooling rate is 50°C / hour.

[0059] (6) Take it out when the temperature drops...

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Abstract

The invention belongs to the technical field of target manufacturing, and particularly relates to a chromium-aluminum alloy target and a manufacturing method of the chromium-aluminum alloy target. Chromium and aluminum are adopted as main elements of the chromium-aluminum alloy target. The target further comprises at least two elements of Co, Ti, Ta, W, Nb, Mo, Zr, V, B, Si, Y, La, Ce and Se. Nitrided, carbonized and nitrided-carbonized composite membrane layer materials of multiple forms can be formed by adding a variety of elements. A product can be further compacted better based on the improved technology for heating treatment. The oxygen content is effectively controlled based on the improved powder mixing and degassing technology.

Description

technical field [0001] The invention belongs to the technical field of target material manufacturing, and in particular relates to a chromium-aluminum alloy target material and a preparation method thereof. Background technique [0002] Chromium-aluminum alloy targets are mainly used in the tool coating industry. The target is generally manufactured by hot pressing or isostatic pressing. Among them, the cost of hot pressing targets is low but the density is low, and the hot isostatic pressing targets have high density. The advantage of being able to mass produce. During the use of the target, reactive sputtering is generally carried out in an environment such as nitrogen or acetylene to form a coating. Coating materials must have high hardness, good wear resistance, stable chemical properties, no chemical reaction with workpiece materials, heat resistance and oxidation resistance, low friction coefficient, and strong adhesion to the substrate. Obviously, a single coating m...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C22C21/00C22C27/06C22C1/04B22F3/15
Inventor 宋爱谋钟小亮
Owner SHANDONG HAO XUAN ELECTRONICS CERAMIC MATERIALS
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