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Surface-discharge ceramic substrate applied to optical pumping source and manufacturing method of surface-discharge ceramic substrate

A surface discharge and ceramic substrate technology, applied in the field of functional materials and their preparation, can solve the problem that the anti-ablation performance cannot meet the requirements of the substrate's anti-discharge plasma ablation, the surface photodischarge optical pump source has a short operating life, and the high power is limited. Repeated frequency XeF applications, etc., to achieve the effects of easy nucleation and growth, optimization of process conditions and parameters, and small residual thermal stress

Active Publication Date: 2015-03-04
NAT UNIV OF DEFENSE TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The anti-ablation performance of a pure ceramic substrate still cannot meet the requirements of the substrate for anti-discharge plasma ablation, and it is also difficult to meet the aforementioned harsh operating environment requirements.
[0005] Currently, limited by the anti-ablation performance of the surface discharge substrate, the operating life of the surface discharge optical pump source is short, which limits the application of high-power repetition frequency XeF(C-A) blue-green lasers in the underwater laser field.

Method used

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  • Surface-discharge ceramic substrate applied to optical pumping source and manufacturing method of surface-discharge ceramic substrate
  • Surface-discharge ceramic substrate applied to optical pumping source and manufacturing method of surface-discharge ceramic substrate
  • Surface-discharge ceramic substrate applied to optical pumping source and manufacturing method of surface-discharge ceramic substrate

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Effect test

Embodiment 1

[0036] Kind of like figure 1 , figure 2 with Figure 4 The alumina surface discharge ceramic substrate used for the optical pump source of the present invention is shown. The surface discharge ceramic substrate has a double-layer superimposed structure and includes an alumina ceramic body 2 (in which α-Al 2 O 3 The content is 95%) and the diamond ablation resistant coating 1 (diamond continuous film) deposited on the alumina ceramic body 2. In this embodiment, the thickness of the diamond ablation resistant coating 1 is 40.0 μm, and the surface resistance is 1.5×10 12 Ω·cm.

[0037] The preparation method of the surface discharge ceramic substrate in this embodiment includes the following steps:

[0038] (1) Choose coarse-diameter diamond powder with a particle size of 4.0μm and fine-diameter diamond powder with a particle size of 0.8μm. The mass ratio of acetone, coarse-diameter diamond powder, fine-diamond diamond powder, and magnesium carbonate is 75 :1:10:14:1, mix well, and ...

Embodiment 2

[0044] Kind of like image 3 , Figure 4 The beryllium oxide surface discharge ceramic substrate for an optical pump source of the present invention is shown. The surface discharge ceramic substrate has a double-layer superimposed structure and includes a beryllium oxide ceramic body 2 and a diamond ablation resistant deposited on the beryllium oxide ceramic body 2 Coating 1 (diamond continuous film). In this embodiment, the thickness of the diamond ablation resistant coating 1 is 80.0 μm, and the surface resistance is 7.2×10 12 Ω·cm.

[0045] The preparation method of the surface discharge ceramic substrate in this embodiment includes the following steps:

[0046] (1) Select coarse-diameter diamond powder with a particle size of 1.0μm and fine-diameter diamond powder with a particle size of 0.1μm. The mass ratio of acetone, coarse-diameter diamond powder, fine-diamond diamond powder, and magnesium carbonate is 85. :6:12:2 is mixed thoroughly to obtain a diamond suspension;

[004...

Embodiment 3

[0052] Kind of like Figure 4 The alumina surface discharge ceramic substrate used for the optical pump source of the present invention is shown. The surface discharge ceramic substrate has a double-layer superimposed structure and includes an alumina ceramic body 2 (in which α-Al 2 O 3 The content is 99%) and the diamond ablation resistant coating 1 (diamond continuous film) deposited on the alumina ceramic body 2. In this embodiment, the thickness of the diamond ablation resistant coating 1 is 100.0 μm, and the surface resistance is 9.0×10 12 Ω·cm.

[0053] The preparation method of the surface discharge ceramic substrate in this embodiment includes the following steps:

[0054] (1) Choose coarse-diameter diamond powder with a particle size of 5.0μm and fine-diameter diamond powder with a particle size of 0.6μm. The mass ratio of acetone, coarse-diameter diamond powder, fine-diamond diamond powder, and magnesium carbonate is 80 :5:14:1 Mix thoroughly and evenly, and then prepare...

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Abstract

The invention discloses a surface-discharge ceramic substrate applied to an optical pumping source. The surface-discharge ceramic substrate comprises a ceramic body and a diamond ablation-resistant coating deposited on the ceramic body, wherein the diamond ablation-resistant coating is deposited in only a region where surface discharge is generated on the surface of the ceramic body. The manufacturing method of the surface-discharge ceramic substrate comprises the following steps: preparing turbid liquid containing diamond powder; pretreating the ceramic body by using a hydrofluoric acid solution and then planting seed crystals for the ceramic body by using the turbid liquid; shielding the region, where no surface discharge is generated, of the ceramic body; depositing the diamond ablation-resistant coating on the surface of the ceramic body by means of hot filament chemical vapor deposition to obtain the surface-discharge ceramic substrate. The surface-discharge ceramic substrate disclosed by the invention is good in plasma ablation resistance, high in reutilization frequency and low in cost.

Description

Technical field [0001] The invention belongs to the technical field of functional materials and their preparation, and particularly relates to a surface discharge substrate used for an optical pump source and a preparation method thereof. Background technique [0002] The XeF (C-A) laser band matches the best window for atmospheric and underwater transmission, with low attenuation, and has potential applications in underwater communications and other fields. XeF(CA) laser can be divided into three forms according to the way of generating pump light (140nm~170nm): (1) electron beam pumping Xe gas to produce fluorescence near 172nm; (2) plasma broadband generated by explosive wire fusing Strong vacuum ultraviolet radiation; (3) Broadband strong vacuum ultraviolet radiation of plasma generated by surface discharge. The wavelength of fluorescence produced by electron beam pumping Xe gas is 172nm, which is in photolysis XeF 2 The edge of the wave band (140nm ~ 170nm), the efficiency ...

Claims

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Application Information

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IPC IPC(8): C04B41/85
Inventor 李俊生魏秋平黄超程海峰周永江罗浩童思超
Owner NAT UNIV OF DEFENSE TECH
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