Eureka AIR delivers breakthrough ideas for toughest innovation challenges, trusted by R&D personnel around the world.

A kind of preparation method of gold-boron alloy target material

A gold-boron alloy target technology, which is applied in the field of gold-boron alloy target preparation, can solve the problems of peeling, unstable content, uneven target structure, etc., reduce the requirements of equipment and technology, and the preparation method is simple and easy , Film composition control precise effect

Active Publication Date: 2016-02-24
NORTHWEST INSTITUTE FOR NON-FERROUS METAL RESEARCH
View PDF3 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantage is that the product yield is low, boron is non-metallic and the target content is high, the internal stress is large during the coating process, and the film adhesion is small, causing the film to wrinkle and peel off; the boron target sputtering process is not easy to stabilize, resulting in The boron content is unstable, which is reflected in two aspects. The atomic ratio of gold and boron in different batches of film layers varies greatly, and the process is not easy to reproduce. Different positions of the same film layer have incomplete distances from gold and boron sputtering targets. Consistently, the atomic ratio of gold and boron is also very different, and the low yield and the difficulty of precise control and instability of the composition have brought great difficulties to the coating
However, the single gold-boron alloy target deposition technology has only been mentioned in some sensitive fields abroad, but no detailed reports have been seen, and there is no public information about the composition and preparation methods of the gold-boron alloy target.
At present, gold-boron alloy targets are being initially developed in China. However, due to the large difference in the melting point and density of gold and boron atoms, the composition of the alloy target cannot be precisely controlled by the traditional smelting process, and the prepared target has uneven structure and composition. Severe segregation and low density cannot meet the requirements of high-quality coating

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A kind of preparation method of gold-boron alloy target material
  • A kind of preparation method of gold-boron alloy target material
  • A kind of preparation method of gold-boron alloy target material

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0022] Preparation of gold-boron alloy target with 20% boron atom content:

[0023] Step 1. Mix gold powder and boron powder evenly, and then press on a hydraulic press to obtain a powder compact; the atomic percentage of boron in the powder compact is 20%, and the balance is gold; the gold powder and boron powder None of the average particle diameters is greater than 50 μm, and none of the mass purity is less than 99.99%; the pressing pressure is 20 MPa, and the pressing time is 2 minutes;

[0024] Step 2. Using a non-consumable vacuum electric arc furnace, the powder compact described in step 1 is subjected to vacuum arc melting twice to obtain an ingot; during each arc melting process, the vacuum degree is controlled to be no greater than 5.0×10 -3 Pa;

[0025] Step 3, breaking the ingot described in step 2, and then using a high-energy ball mill to high-energy ball mill the crushed ingot for 2 hours at a ball milling rate of 400 r / min to obtain gold-boron alloy powder wit...

Embodiment 2

[0029] Preparation of a gold-boron alloy target with a boron atom content of 40%:

[0030] Step 1. Mix gold powder and boron powder evenly, and then press on a hydraulic press to obtain a powder compact; the atomic percentage of boron in the powder compact is 40%, and the balance is gold; the gold powder and boron powder None of the average particle diameters is greater than 50 μm, and the mass purity is not less than 99.99%; the pressing pressure is 30 MPa, and the pressing time is 1 min;

[0031] Step 2. Using a non-consumable vacuum electric arc furnace, the powder compact described in step 1 is subjected to vacuum arc melting twice to obtain an ingot; during each arc melting process, the vacuum degree is controlled to be no greater than 5.0×10 -3 Pa;

[0032] Step 3, breaking the ingot described in step 2, and then using a high-energy ball mill to high-energy ball mill the crushed ingot for 2 hours at a ball milling rate of 400 r / min to obtain gold-boron alloy powder with...

Embodiment 3

[0036] Preparation of gold-boron alloy target with 60% boron atom content:

[0037] Step 1. Mix gold powder and boron powder evenly, and then press on a hydraulic press to obtain a powder compact; the atomic percentage of boron in the powder compact is 60%, and the balance is gold; the gold powder and boron powder None of the average particle diameters is greater than 50 μm, and the mass purity is not less than 99.99%; the pressing pressure is 25 MPa, and the pressing time is 2 minutes;

[0038] Step 2. Using a non-consumable vacuum electric arc furnace, the powder compact described in step 1 is subjected to vacuum arc melting twice to obtain an ingot; during each arc melting process, the vacuum degree is controlled to be no greater than 5.0×10 -3 Pa;

[0039] Step 3, breaking the ingot described in step 2, and then using a high-energy ball mill to high-energy ball mill the crushed ingot for 1.5 hours at a ball milling rate of 450r / min to obtain gold-boron alloy powder with a...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
particle sizeaaaaaaaaaa
Login to View More

Abstract

The invention provides a method for preparing a gold-boron alloy target material. The method comprises the following steps: 1, uniformly mixing gold powder with boron powder, and pressing to obtain a pressed powder blank, wherein the atomic percentage content of boron in the pressed powder blank is 20-60%, and the balance is gold; 2, performing vacuum electric arc melting on the pressed powder blank twice to obtain an ingot blank; 3, crushing the ingot blank, and subsequently performing high-energy ball-milling on the crushed ingot blank to obtain gold-boron alloy powder; and 4, performing vacuum hot pressed sintering on the gold-boron alloy powder so as to obtain the gold-boron alloy target material. The method is simple and feasible, the prepared gold-boron alloy target material is high in quality purity, low in impurity content, stable in component, uniform in texture and high in density, and the use requirements of a high-quality plating film can be met.

Description

technical field [0001] The invention belongs to the technical field of gold-boron alloy material processing, and in particular relates to a preparation method of a gold-boron alloy target. Background technique [0002] In the field of vacuum coating, there are two technical approaches for the preparation of gold-boron film layers, namely co-deposition of gold and boron single substance targets and single gold-boron alloy target deposition. For the co-deposition of gold and boron single substance targets, the advantage is that the power of the two targets can be adjusted conveniently to achieve the composition ratio of gold and boron, and there is no need to develop a gold-boron alloy target. The disadvantage is that the product yield is low, boron is non-metallic and the target content is high, the internal stress is large during the coating process, and the film adhesion is small, causing the film to wrinkle and peel off; the boron target sputtering process is not easy to s...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/34
Inventor 操齐高郑晶姜婷贾志华马光李银娥张科
Owner NORTHWEST INSTITUTE FOR NON-FERROUS METAL RESEARCH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Eureka Blog
Learn More
PatSnap group products