Method for improving leakage current characteristics of dry-type multilayer ceramic capacitors
A technology of laminated ceramics and leakage current, which is applied in the direction of fixed capacitor electrodes and parts of fixed capacitors, etc., can solve the problems that the leakage current characteristics are difficult to improve, and achieve the advantages of improving leakage current characteristics, improving evaporation conditions, and strong stability Effect
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[0035] Such as Figure 1-3 As shown, the method for improving the leakage current characteristics of dry-type laminated ceramic capacitors includes the following steps:
[0036] S1: Wafer preparation stage;
[0037] S2: specify the electrode layer on the wafer and the stacked layer number stage of the dielectric layer;
[0038] S3: the stage of forming an initial insulating layer on the wafer;
[0039] S4: a stage of forming an electrode layer on the initial insulating layer;
[0040] S5: a stage of forming a dielectric layer on the electrode layer;
[0041] S6: The stage in which electrode layers and dielectric layers are repeatedly laminated;
[0042] S7: After lamination, the stage of heat treatment of electrode layer and dielectric layer;
[0043] S8: the stage of forming a protective layer after heat treatment;
[0044] S9: After the protective layer is formed, the wafer back grinding stage;
[0045] S10: Cutting stage in chip form after wafer back grinding;
[00...
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