Terahertz isolator based on photonic crystal heterojunction
A photonic crystal and heterojunction technology, applied in the field of terahertz isolators, can solve problems such as lack of terahertz isolators, and achieve the effect of high forward transmittance and high reverse isolation
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[0022] High-resistance monocrystalline silicon is a suitable insulating material in the terahertz band, and has good processing properties, so high-resistance silicon is generally selected to prepare such terahertz isolators by mechanical inversion processing, electrochemical corrosion and other methods. Mechanical inversion processing adopts a method similar to the early grating processing method, and uses a stepping motor to mechanically carve the required photonic crystal heterojunction 1 on the anti-vibration table. The electrochemical etching method adopts a method similar to the corrosion processing of integrated circuits. First, a corrosion mask is made, and photoresist is coated on the aluminum film. The excess photoresist is washed away, and the required photonic crystal heterojunction 1 is processed by electrochemical etching with hydrofluoric acid.
[0023] figure 1 It is a schematic structural diagram of a terahertz isolator based on a photonic crystal heterojunct...
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