Micro-flow control chip machining and detection experiment device based on digital micro-mirror device

Abstract

The invention provides a micro-flow control chip machining and detection experiment device based on a digital micro-mirror device, comprising an ultraviolet LED (Light-Emitting Diode) light source, a first double-convex lens, a first reflection mirror, a DMD (Digital Micro-mirror Device), a dichroic mirror, a first microscope objective lens, a three-dimensional electric platform, a second microscope objective lens, a second double-convex lens, a white light LED light source, a second reflection mirror, a light filtering mirror, a third double-convex lens, a CCD (Charge Coupled Display) camera and a computer. The experiment device can effectively work at two modes of photoresist exposure and visible light and ultraviolet fluorescence detection of a micro-flow control chip; and the computer is respectively connected with an ultraviolet LED light source, the white light LED light source, the DMD, the a three-dimensional electric platform and the CCD camera. The micro-flow control chip machining and detection experiment device based on the digital micro-mirror device can realize soft photoetching exposure of a micro-flow-channel pattern in a manufacturing process of the micro-flow control chip and can also realize the real-time visible light and ultraviolet fluorescence detection of trace samples in the micro-flow control chip.

Description

technical field [0001] The invention belongs to the technical field of micromachining and microfluidic sample detection, and in particular relates to a novel experimental device for rapid processing of microfluidic chips and real-time detection of microfluidic samples based on a digital micromirror device (DMD). Background technique [0002] Since its appearance, microfluidic chips have played an important role in the fields of analytical chemistry, systems biology, biophysics, clinical medicine, and biopharmaceuticals. Microfluidic chip technology itself is constantly developing and improving in these applications. The manufacture and processing of microfluidic channels in microfluidic chips has expanded from the original microelectromechanical processing technology (such as chemical etching) in the field of microelectronics to new technologies such as photolithography and soft lithography. The detection of micro-sample in the microfluidic chip has also borrowed a large nu...

AI Technical Summary

Problems solved by technology

[0003] The existing microfluidic chip processing and manufacturing technology does not combine the design process of the microfluidic channel with the manufacturing process well, and cannot realize the soft lithographic exposure of the microfluidic channel pattern and the control of the microfluidic chip during the fabrication of the microfluidic chip. Real-time detection of visible light and ultraviolet fluorescence of trace samples in the chip, so microfluidic chip processing and detection cannot be realized on the same device at the same time, and rapid processing and real-time detection cannot be realized

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