Parallel confocal detection system and method

Abstract

The invention discloses a parallel confocal detection system and a parallel confocal detection method. The system comprises a mono-color LED (light-emitting diode) light source, a digital micro-lens, two lenses, a beam splitter prism, an electric-control variable focal length lens, a detection pinhole, a light strength detector, a voltage controller and a PC (personnel computer). Lights sent out by the mono-color LED light source are irradiated on the surface of the digital micro-lens through a light collection lens and a light source is modulated by the digital micro-lens to form a pinhole array; the lights are changed into a parallel light beam by the lens to be focused on the surface of an object to be detected; the lights reflected by the object to be detected are emitted into a light strength array detector; and a sample is transversely or axially scanned through a digital micro-lens device. A voltage on the electric-control variable focal length lens is controlled by the PC to change a focal length of the variable focal length lens for a tiny value delta f, and a light strength numerical value on the detector is recorded; the axial position of the corresponding point of the object to be detected is obtained according to the light strength value obtained by scanning; and the surface outline of the whole object to be detected is measured. According to the parallel confocal detection system and parallel confocal detection method, the stability and the scanning speed of the system can be improved.

Description

technical field [0001] The invention belongs to the technical field of confocal imaging, and relates to a confocal detection system, in particular to a parallel confocal detection system; meanwhile, the invention also relates to a parallel confocal detection method of the parallel confocal detection system. Background technique [0002] In 1957, M.Minsky, a postdoctoral fellow at Harvard University, proposed the concept of confocal imaging for the first time. The purpose was to eliminate the various scattered lights produced by ordinary optical microscopes when detecting samples. For this reason, he proposed a new imaging model - confocal imaging. In this imaging model, a point light source is introduced and imaged on the surface of the measured object, and the light reflected by the measured object is received by a very small light intensity detector (which can be regarded as a point detector). When the point light source, the measured object and the point detector are con...

AI Technical Summary

Problems solved by technology

However, due to the introduction of mechanical rotation, the measurement accuracy is greatly affected

The parallel transverse scanning technology mainly includes Nipkow disk and microlens array, which can solve the problem of single-point confocal microscope, but the optical parameters of Nipkow disk and microlens array are determined after they are fabricated, and flexible measurement cannot be realized.

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