High-density capacitor and electrode leading-out method thereof

Abstract

The invention relates to a high-density capacitor and an electrode leading-out method thereof, wherein the capacitor comprises a substrate, on which a plurality of local electrode layers grow, the local electrode layers include even local electrode layers and odd local electrode layers matched with the even local electrode layers, and high dielectric constant dielectric layers are arranged between the odd local electrode layers and the even local electrode layers, interconnection electrode layers comprising even interconnection electrodes and odd interconnection electrodes are arranged above the substrate, and the odd interconnection electrodes are isolated from the even interconnection electrodes in an insulating manner. The capacitor provided by the invention has the advantages of high electric capacity, small equivalent series inductance and adjustable equivalent series inductance; and the equivalent series inductance can be regulated according to the demands of the circuit so as to reach the best matching. With the advantages of high precision, high reliability, small volume, long service life and environmental protection, the product is widely used for decoupling a high frequency circuit and removing noise; and the product can be used in a common tank circuit. The capacitor can be integrated in an IC (integrated circuit) chip or packaged in a same package together with the IC easily.

Description

Technical field [0001] The invention relates to a capacitor and an electrode extraction method thereof, in particular to a high-density capacitor and an electrode extraction method thereof, belonging to the technical field of high-density capacitors. Background technique [0002] At present, the commonly used capacitors on the market are aluminum electrolytic capacitors, tantalum electrolytic capacitors, multilayer ceramic capacitors, and electric double layer capacitors. Liquid electrolytic capacitors have the advantages of low price and large capacity, but because they contain liquid electrolyte, they often have disadvantages such as large volume, large equivalent series resistance, poor high-frequency performance, poor high temperature resistance, short service life, and pollution to the environment. ; Electric double-layer capacitors also use liquid electrolyte, but also have disadvantages such as large volume, limited operating temperature, large equivalent series resistance...

AI Technical Summary

Problems solved by technology

Liquid electrolytic capacitors have the advantages of low price and large capacity, but because they contain liquid electrolyte, they often have disadvantages such as large volume, large equivalent series resistance, poor high frequency performance, poor high temperature resistance, short service life, and pollution to the environment. ;Electric double layer capacitors also use liquid electrolyte, but there are also disadvantages such as large volume, limited operating temperature, large equivalent series resistance, and environmental pollution.

Although solid polymer capacitors have greatly improved the high-frequency performance, high temperature resistance, and short service life of liquid electrolytic capacitors, they still have the disadvantages of large volume, large equivalent series inductance, and low operating voltage; In recent years, although there has been a lot of progress in multilayer ceramic capacitor technology, due to the limitation of its processing technology, its equivalent inductance value and capacitance are still difficult to meet the increasing demand for large capacity and high frequency of electronic circuits, and its thickness is relatively thick, Factors such as incompatibility with semiconductor processes make it difficult to integrate with integrated circuits

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