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Method for preparing anti-oxidation Nb coating on surface of carbon material

A carbon material, anti-oxidation technology, applied in metal material coating process, coating, ion implantation plating, etc., can solve the problems of affecting anti-oxidation ability, complex CVD process, and many influencing parameters, and achieve good high temperature anti-oxidation Performance, simple process, and the effect of controlling the thickness of the coating

Inactive Publication Date: 2011-07-20
SHAANXI UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the coatings prepared by these methods generally contain many microcracks and holes, which affect their oxidation resistance.
Moreover, the CVD process is complex, with many influencing parameters, and requires high equipment

Method used

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  • Method for preparing anti-oxidation Nb coating on surface of carbon material
  • Method for preparing anti-oxidation Nb coating on surface of carbon material

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0017] Step 1: Coating carbon fiber with SiO 2 Grinding and polishing with sandpaper, then ultrasonically cleaning in absolute ethanol solution, finally rinsing with deionized water, and drying for later use;

[0018] Step 2: Using ultra-high vacuum multifunctional magnetron sputtering coating equipment, install the carbon fiber obtained in step 1 on the substrate holder in the sampling chamber;

[0019] Step 3: placing a metal Nb target with a purity of 99.9% on the DC cathode in the main sputtering chamber as a target;

[0020] Step 4: Vacuum the main sputtering chamber and sample chamber until the background vacuum is less than or equal to 10 -4 After Pa, feed the high-purity Ar gas that purity is 99.99% to it, and the pressure of argon is controlled at 3Pa;

[0021] Step 5: Adjust the distance between the carbon fiber and the target to be 30 mm, the sputtering power of the initiation is 100 W, and the sample is taken out after sputtering for 10 minutes to obtain an anti-...

Embodiment 2

[0023] Step 1: Use SiO for Graphite 2 Grinding and polishing with sandpaper, then ultrasonic cleaning in absolute ethanol solution, finally rinsing with deionized water, and drying for later use;

[0024] Step 2: Using an ultra-high vacuum multifunctional magnetron sputtering coating equipment, install the graphite obtained in step 1 on the substrate holder in the sampling chamber;

[0025] Step 3: placing a metal Nb target with a purity of 99.9% on the DC cathode in the main sputtering chamber as a target;

[0026] Step 4: Vacuum the main sputtering chamber and sample chamber until the background vacuum is less than or equal to 10 -4 After Pa, feed the high-purity Ar gas that purity is 99.99% to it, and the pressure of argon is controlled at 5Pa;

[0027] Step 5: Adjust the distance between the graphite and the target to 40 mm, the initiation sputtering power to 200 W, and take out the sample after sputtering for 20 minutes to obtain an oxidation-resistant Nb coating on the...

Embodiment 3

[0029] Step 1: SiO for carbon / carbon composites 2 Grinding and polishing with sandpaper, then ultrasonic cleaning in absolute ethanol solution, finally rinsing with deionized water, and drying for later use;

[0030] Step 2: Using an ultra-high vacuum multifunctional magnetron sputtering coating equipment, install the carbon material obtained in step 1 on the substrate holder in the sampling chamber;

[0031] Step 3: placing a metal Nb target with a purity of 99.9% on the DC cathode in the main sputtering chamber as a target;

[0032] Step 4: Vacuum the main sputtering chamber and sample chamber until the background vacuum is less than or equal to 10 -4 After Pa, feed into it the high-purity Ar gas that purity is 99.99%, and the pressure of argon is controlled at 7Pa;

[0033] Step 5: Adjust the distance between the base material and the target to 50 mm, the initiation sputtering power to 300 W, and take out the sample after sputtering for 30 minutes to obtain an oxidation-r...

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Abstract

The invention provides a method for preparing an anti-oxidation Nb coating on the surface of a carbon material. In the method, ultrahigh vacuum multifunctional magnetron sputtering coating equipment is adopted, metal Nb with the purity of 99.9 percent is taken as a target, 99.99 volume percent high-purity argon is taken as sputtering gas, and the anti-oxidation Nb coating is prepared on the surface of a graphite material through direct current magnetron sputtering. The anti-oxidation Nb coating prepared by the method has high compactness and uniformity, thermal shock resistance and high high-temperature oxidation resistance; the thickness of the coating is convenient to control by adjusting a magnetron sputtering process parameter, and the coating is convenient to prepare on a large scale; the temperature rise of a base material is low when the coating is prepared, and the components of the coating are uniform and stable; and the process is relatively simple and high in repeatability.

Description

technical field [0001] The invention relates to a method for preparing an anti-oxidation coating on the surface of carbon materials, belonging to the field of carbon material protection. Background technique [0002] Carbon materials have excellent properties such as high-temperature strength, good electrical conductivity and heat transfer, and corrosion resistance. They are widely used in high-temperature fields such as aerospace, nuclear energy, electronics, chemical industry, and metallurgy as structural and engineering materials. However, the oxidation reaction of carbon materials begins to occur in an oxidizing atmosphere above 370°C, which reduces their physical and mechanical properties and limits their high-temperature use characteristics. Therefore, the oxidation protection of carbon materials is the fundamental measure to prolong their working life and improve their working stability and reliability. [0003] Coating carbon materials is an effective method to solv...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/18C23C14/35C04B41/88
Inventor 李翠艳黄剑锋刘辉曹丽云卢靖吴建鹏
Owner SHAANXI UNIV OF SCI & TECH
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