Large-irradiation-area atomic oxygen beam simulation system
A simulation system, atomic oxygen technology, applied in the field of simulation system, can solve the problems of inability to carry out test verification, low test efficiency, restricting the application of test technology, etc., to shorten the test period, reduce the test cost, and improve the test efficiency.
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment 1
[0024] Using this large-irradiation area atomic oxygen beam simulation system, install and debug on a Φ500mm×600mm vacuum vessel to construct an atomic oxygen environment ground simulation test equipment. The atomic oxygen beam simulation system is connected with the main container through a Φ150mm flange.
[0025] According to the above methods and steps, a large irradiated area atomic oxygen beam simulation system is built. The vacuum chamber of the device is welded by non-magnetic stainless steel plates with a thickness of 4 to 5 mm, which can withstand the internal and external pressure difference caused by high vacuum and can Avoid the influence of anti-electric cavity magnetization on plasma anti-electricity. A microwave antenna window, an observation window, a molybdenum plate installation window, a molybdenum plate azimuth adjustment window, a connection window with the main container, and an electrostatic probe window are designed and processed on the container. The micr...
PUM
Property | Measurement | Unit |
---|---|---|
thickness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com